3/17/2011	9:08:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/17/2011	9:08:47 AM	Recipe started at 9:08 AM
3/17/2011	9:08:47 AM	H2 valve closed
3/17/2011	9:08:47 AM	BCl3 valve closed
3/17/2011	9:08:47 AM	PH3 valve closed
3/17/2011	9:08:47 AM	SiCl4 pre valve closed
3/17/2011	9:08:47 AM	SiCl4 post valve closed
3/17/2011	9:08:47 AM	Main Vac valve closed
3/17/2011	9:08:47 AM	Bypass valve closed
3/17/2011	9:08:47 AM	Bubbler valve closed
3/17/2011	9:08:47 AM	Helium valve opened
3/17/2011	9:08:47 AM	Helium MFC set to  500.000000
3/17/2011	9:08:47 AM	H2 MFC set to  0.000000
3/17/2011	9:08:47 AM	BCl3 MFC set to  0.000000
3/17/2011	9:08:47 AM	PHl3 MFC set to  0.000000
3/17/2011	9:08:47 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:08:47 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:08:47 AM	Tube furnace set to 0
3/17/2011	9:09:00 AM	Helium valve closed
3/17/2011	9:09:00 AM	H2 valve closed
3/17/2011	9:09:00 AM	BCl3 valve closed
3/17/2011	9:09:00 AM	PH3 valve closed
3/17/2011	9:09:00 AM	SiCl4 pre valve closed
3/17/2011	9:09:00 AM	SiCl4 post valve closed
3/17/2011	9:09:00 AM	Main Vac valve closed
3/17/2011	9:09:00 AM	Bypass valve closed
3/17/2011	9:09:00 AM	Bubbler valve closed
3/17/2011	9:09:00 AM	Helium MFC set to  0.000000
3/17/2011	9:09:00 AM	H2 MFC set to  0.000000
3/17/2011	9:09:00 AM	BCl3 MFC set to  0.000000
3/17/2011	9:09:00 AM	PHl3 MFC set to  0.000000
3/17/2011	9:09:00 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:09:00 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:09:00 AM	Tube furnace set to 0
3/17/2011	9:09:00 AM	Run finished at 9:09 AM
3/17/2011	9:09:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/17/2011	9:18:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	9:18:39 AM	Recipe started at 9:18 AM
3/17/2011	9:18:39 AM	Helium valve closed
3/17/2011	9:18:39 AM	H2 valve closed
3/17/2011	9:18:39 AM	BCl3 valve closed
3/17/2011	9:18:39 AM	PH3 valve closed
3/17/2011	9:18:39 AM	SiCl4 pre valve closed
3/17/2011	9:18:39 AM	SiCl4 post valve closed
3/17/2011	9:18:39 AM	Main Vac valve closed
3/17/2011	9:18:39 AM	Bubbler valve closed
3/17/2011	9:18:39 AM	Bypass valve opened
3/17/2011	9:18:40 AM	Helium MFC set to  0.000000
3/17/2011	9:18:40 AM	H2 MFC set to  0.000000
3/17/2011	9:18:40 AM	BCl3 MFC set to  0.000000
3/17/2011	9:18:40 AM	PHl3 MFC set to  0.000000
3/17/2011	9:18:40 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:18:40 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:18:40 AM	Tube furnace set to 0
3/17/2011	9:19:12 AM	Helium valve closed
3/17/2011	9:19:12 AM	H2 valve closed
3/17/2011	9:19:12 AM	BCl3 valve closed
3/17/2011	9:19:12 AM	PH3 valve closed
3/17/2011	9:19:12 AM	SiCl4 pre valve closed
3/17/2011	9:19:12 AM	SiCl4 post valve closed
3/17/2011	9:19:12 AM	Bubbler valve closed
3/17/2011	9:19:12 AM	Main Vac valve opened
3/17/2011	9:19:12 AM	Bypass valve opened
3/17/2011	9:19:12 AM	Helium MFC set to  0.000000
3/17/2011	9:19:12 AM	H2 MFC set to  0.000000
3/17/2011	9:19:12 AM	BCl3 MFC set to  0.000000
3/17/2011	9:19:12 AM	PHl3 MFC set to  0.000000
3/17/2011	9:19:12 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:19:12 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:19:12 AM	Tube furnace set to 0
3/17/2011	9:20:12 AM	H2 valve closed
3/17/2011	9:20:12 AM	BCl3 valve closed
3/17/2011	9:20:12 AM	PH3 valve closed
3/17/2011	9:20:12 AM	SiCl4 pre valve closed
3/17/2011	9:20:12 AM	SiCl4 post valve closed
3/17/2011	9:20:12 AM	Bubbler valve closed
3/17/2011	9:20:12 AM	Helium valve opened
3/17/2011	9:20:12 AM	Main Vac valve opened
3/17/2011	9:20:12 AM	Bypass valve opened
3/17/2011	9:20:12 AM	Helium MFC set to  100.000000
3/17/2011	9:20:12 AM	H2 MFC set to  0.000000
3/17/2011	9:20:12 AM	BCl3 MFC set to  0.000000
3/17/2011	9:20:12 AM	PHl3 MFC set to  0.000000
3/17/2011	9:20:12 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:20:12 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:20:12 AM	Tube furnace set to 0
3/17/2011	9:21:12 AM	Helium valve closed
3/17/2011	9:21:12 AM	H2 valve closed
3/17/2011	9:21:12 AM	BCl3 valve closed
3/17/2011	9:21:12 AM	PH3 valve closed
3/17/2011	9:21:12 AM	SiCl4 pre valve closed
3/17/2011	9:21:12 AM	SiCl4 post valve closed
3/17/2011	9:21:12 AM	Bubbler valve closed
3/17/2011	9:21:12 AM	Main Vac valve opened
3/17/2011	9:21:12 AM	Bypass valve opened
3/17/2011	9:21:12 AM	Helium MFC set to  0.000000
3/17/2011	9:21:12 AM	H2 MFC set to  0.000000
3/17/2011	9:21:12 AM	BCl3 MFC set to  0.000000
3/17/2011	9:21:12 AM	PHl3 MFC set to  0.000000
3/17/2011	9:21:12 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:21:12 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:21:13 AM	Tube furnace set to 0
3/17/2011	9:22:13 AM	H2 valve closed
3/17/2011	9:22:13 AM	BCl3 valve closed
3/17/2011	9:22:13 AM	PH3 valve closed
3/17/2011	9:22:13 AM	SiCl4 pre valve closed
3/17/2011	9:22:13 AM	SiCl4 post valve closed
3/17/2011	9:22:13 AM	Bubbler valve closed
3/17/2011	9:22:13 AM	Helium valve opened
3/17/2011	9:22:13 AM	Main Vac valve opened
3/17/2011	9:22:13 AM	Bypass valve opened
3/17/2011	9:22:13 AM	Helium MFC set to  100.000000
3/17/2011	9:22:13 AM	H2 MFC set to  0.000000
3/17/2011	9:22:13 AM	BCl3 MFC set to  0.000000
3/17/2011	9:22:13 AM	PHl3 MFC set to  0.000000
3/17/2011	9:22:13 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:22:13 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:22:13 AM	Tube furnace set to 0
3/17/2011	9:23:13 AM	Helium valve closed
3/17/2011	9:23:13 AM	H2 valve closed
3/17/2011	9:23:13 AM	BCl3 valve closed
3/17/2011	9:23:13 AM	PH3 valve closed
3/17/2011	9:23:13 AM	SiCl4 pre valve closed
3/17/2011	9:23:13 AM	SiCl4 post valve closed
3/17/2011	9:23:13 AM	Bubbler valve closed
3/17/2011	9:23:13 AM	Main Vac valve opened
3/17/2011	9:23:13 AM	Bypass valve opened
3/17/2011	9:23:13 AM	Helium MFC set to  0.000000
3/17/2011	9:23:13 AM	H2 MFC set to  0.000000
3/17/2011	9:23:13 AM	BCl3 MFC set to  0.000000
3/17/2011	9:23:13 AM	PHl3 MFC set to  0.000000
3/17/2011	9:23:13 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:23:13 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:23:13 AM	Tube furnace set to 0
3/17/2011	9:24:13 AM	H2 valve closed
3/17/2011	9:24:13 AM	BCl3 valve closed
3/17/2011	9:24:13 AM	PH3 valve closed
3/17/2011	9:24:13 AM	SiCl4 pre valve closed
3/17/2011	9:24:13 AM	SiCl4 post valve closed
3/17/2011	9:24:13 AM	Bubbler valve closed
3/17/2011	9:24:13 AM	Helium valve opened
3/17/2011	9:24:13 AM	Main Vac valve opened
3/17/2011	9:24:13 AM	Bypass valve opened
3/17/2011	9:24:13 AM	Helium MFC set to  100.000000
3/17/2011	9:24:13 AM	H2 MFC set to  0.000000
3/17/2011	9:24:13 AM	BCl3 MFC set to  0.000000
3/17/2011	9:24:13 AM	PHl3 MFC set to  0.000000
3/17/2011	9:24:13 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:24:13 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:24:13 AM	Tube furnace set to 0
3/17/2011	9:25:13 AM	Helium valve closed
3/17/2011	9:25:13 AM	H2 valve closed
3/17/2011	9:25:13 AM	BCl3 valve closed
3/17/2011	9:25:13 AM	PH3 valve closed
3/17/2011	9:25:13 AM	SiCl4 pre valve closed
3/17/2011	9:25:13 AM	SiCl4 post valve closed
3/17/2011	9:25:13 AM	Bubbler valve closed
3/17/2011	9:25:13 AM	Main Vac valve opened
3/17/2011	9:25:13 AM	Bypass valve opened
3/17/2011	9:25:13 AM	Helium MFC set to  0.000000
3/17/2011	9:25:13 AM	H2 MFC set to  0.000000
3/17/2011	9:25:13 AM	BCl3 MFC set to  0.000000
3/17/2011	9:25:13 AM	PHl3 MFC set to  0.000000
3/17/2011	9:25:13 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:25:13 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:25:13 AM	Tube furnace set to 0
3/17/2011	9:26:13 AM	H2 valve closed
3/17/2011	9:26:13 AM	BCl3 valve closed
3/17/2011	9:26:13 AM	PH3 valve closed
3/17/2011	9:26:13 AM	SiCl4 pre valve closed
3/17/2011	9:26:13 AM	SiCl4 post valve closed
3/17/2011	9:26:13 AM	Bubbler valve closed
3/17/2011	9:26:13 AM	Helium valve opened
3/17/2011	9:26:13 AM	Main Vac valve opened
3/17/2011	9:26:13 AM	Bypass valve opened
3/17/2011	9:26:13 AM	Helium MFC set to  100.000000
3/17/2011	9:26:13 AM	H2 MFC set to  0.000000
3/17/2011	9:26:13 AM	BCl3 MFC set to  0.000000
3/17/2011	9:26:13 AM	PHl3 MFC set to  0.000000
3/17/2011	9:26:13 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:26:13 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:26:13 AM	Tube furnace set to 0
3/17/2011	9:27:14 AM	Helium valve closed
3/17/2011	9:27:14 AM	H2 valve closed
3/17/2011	9:27:14 AM	BCl3 valve closed
3/17/2011	9:27:14 AM	PH3 valve closed
3/17/2011	9:27:14 AM	SiCl4 pre valve closed
3/17/2011	9:27:14 AM	SiCl4 post valve closed
3/17/2011	9:27:14 AM	Bubbler valve closed
3/17/2011	9:27:14 AM	Main Vac valve opened
3/17/2011	9:27:14 AM	Bypass valve opened
3/17/2011	9:27:14 AM	Helium MFC set to  0.000000
3/17/2011	9:27:14 AM	H2 MFC set to  0.000000
3/17/2011	9:27:14 AM	BCl3 MFC set to  0.000000
3/17/2011	9:27:14 AM	PHl3 MFC set to  0.000000
3/17/2011	9:27:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:27:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:27:14 AM	Tube furnace set to 0
3/17/2011	9:28:14 AM	H2 valve closed
3/17/2011	9:28:14 AM	BCl3 valve closed
3/17/2011	9:28:14 AM	PH3 valve closed
3/17/2011	9:28:14 AM	SiCl4 pre valve closed
3/17/2011	9:28:14 AM	SiCl4 post valve closed
3/17/2011	9:28:14 AM	Bubbler valve closed
3/17/2011	9:28:14 AM	Helium valve opened
3/17/2011	9:28:14 AM	Main Vac valve opened
3/17/2011	9:28:14 AM	Bypass valve opened
3/17/2011	9:28:14 AM	Helium MFC set to  100.000000
3/17/2011	9:28:14 AM	H2 MFC set to  0.000000
3/17/2011	9:28:14 AM	BCl3 MFC set to  0.000000
3/17/2011	9:28:14 AM	PHl3 MFC set to  0.000000
3/17/2011	9:28:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:28:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:28:14 AM	Tube furnace set to 0
3/17/2011	9:29:14 AM	Helium valve closed
3/17/2011	9:29:14 AM	H2 valve closed
3/17/2011	9:29:14 AM	BCl3 valve closed
3/17/2011	9:29:14 AM	PH3 valve closed
3/17/2011	9:29:14 AM	SiCl4 pre valve closed
3/17/2011	9:29:14 AM	SiCl4 post valve closed
3/17/2011	9:29:14 AM	Bubbler valve closed
3/17/2011	9:29:14 AM	Main Vac valve opened
3/17/2011	9:29:14 AM	Bypass valve opened
3/17/2011	9:29:14 AM	Helium MFC set to  0.000000
3/17/2011	9:29:14 AM	H2 MFC set to  0.000000
3/17/2011	9:29:14 AM	BCl3 MFC set to  0.000000
3/17/2011	9:29:14 AM	PHl3 MFC set to  0.000000
3/17/2011	9:29:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:29:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:29:14 AM	Tube furnace set to 0
3/17/2011	9:30:14 AM	H2 valve closed
3/17/2011	9:30:14 AM	BCl3 valve closed
3/17/2011	9:30:14 AM	PH3 valve closed
3/17/2011	9:30:14 AM	SiCl4 pre valve closed
3/17/2011	9:30:14 AM	SiCl4 post valve closed
3/17/2011	9:30:14 AM	Bubbler valve closed
3/17/2011	9:30:14 AM	Helium valve opened
3/17/2011	9:30:14 AM	Main Vac valve opened
3/17/2011	9:30:14 AM	Bypass valve opened
3/17/2011	9:30:14 AM	Helium MFC set to  100.000000
3/17/2011	9:30:14 AM	H2 MFC set to  0.000000
3/17/2011	9:30:14 AM	BCl3 MFC set to  0.000000
3/17/2011	9:30:14 AM	PHl3 MFC set to  0.000000
3/17/2011	9:30:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:30:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:30:14 AM	Tube furnace set to 0
3/17/2011	9:31:14 AM	Helium valve closed
3/17/2011	9:31:14 AM	H2 valve closed
3/17/2011	9:31:14 AM	BCl3 valve closed
3/17/2011	9:31:14 AM	PH3 valve closed
3/17/2011	9:31:14 AM	SiCl4 pre valve closed
3/17/2011	9:31:14 AM	SiCl4 post valve closed
3/17/2011	9:31:14 AM	Bubbler valve closed
3/17/2011	9:31:14 AM	Main Vac valve opened
3/17/2011	9:31:14 AM	Bypass valve opened
3/17/2011	9:31:14 AM	Helium MFC set to  0.000000
3/17/2011	9:31:14 AM	H2 MFC set to  0.000000
3/17/2011	9:31:14 AM	BCl3 MFC set to  0.000000
3/17/2011	9:31:14 AM	PHl3 MFC set to  0.000000
3/17/2011	9:31:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:31:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:31:14 AM	Tube furnace set to 0
3/17/2011	9:32:15 AM	H2 valve closed
3/17/2011	9:32:15 AM	BCl3 valve closed
3/17/2011	9:32:15 AM	PH3 valve closed
3/17/2011	9:32:15 AM	SiCl4 pre valve closed
3/17/2011	9:32:15 AM	SiCl4 post valve closed
3/17/2011	9:32:15 AM	Bubbler valve closed
3/17/2011	9:32:15 AM	Helium valve opened
3/17/2011	9:32:15 AM	Main Vac valve opened
3/17/2011	9:32:15 AM	Bypass valve opened
3/17/2011	9:32:15 AM	Helium MFC set to  100.000000
3/17/2011	9:32:15 AM	H2 MFC set to  0.000000
3/17/2011	9:32:15 AM	BCl3 MFC set to  0.000000
3/17/2011	9:32:15 AM	PHl3 MFC set to  0.000000
3/17/2011	9:32:15 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:32:15 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:32:15 AM	Tube furnace set to 0
3/17/2011	9:33:15 AM	Helium valve closed
3/17/2011	9:33:15 AM	H2 valve closed
3/17/2011	9:33:15 AM	BCl3 valve closed
3/17/2011	9:33:15 AM	PH3 valve closed
3/17/2011	9:33:15 AM	SiCl4 pre valve closed
3/17/2011	9:33:15 AM	SiCl4 post valve closed
3/17/2011	9:33:15 AM	Bubbler valve closed
3/17/2011	9:33:15 AM	Main Vac valve opened
3/17/2011	9:33:15 AM	Bypass valve opened
3/17/2011	9:33:15 AM	Helium MFC set to  0.000000
3/17/2011	9:33:15 AM	H2 MFC set to  0.000000
3/17/2011	9:33:15 AM	BCl3 MFC set to  0.000000
3/17/2011	9:33:15 AM	PHl3 MFC set to  0.000000
3/17/2011	9:33:15 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:33:15 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:33:15 AM	Tube furnace set to 0
3/17/2011	9:34:15 AM	H2 valve closed
3/17/2011	9:34:15 AM	BCl3 valve closed
3/17/2011	9:34:15 AM	PH3 valve closed
3/17/2011	9:34:15 AM	SiCl4 pre valve closed
3/17/2011	9:34:15 AM	SiCl4 post valve closed
3/17/2011	9:34:15 AM	Bubbler valve closed
3/17/2011	9:34:15 AM	Helium valve opened
3/17/2011	9:34:15 AM	Main Vac valve opened
3/17/2011	9:34:15 AM	Bypass valve opened
3/17/2011	9:34:15 AM	Helium MFC set to  100.000000
3/17/2011	9:34:15 AM	H2 MFC set to  0.000000
3/17/2011	9:34:15 AM	BCl3 MFC set to  0.000000
3/17/2011	9:34:15 AM	PHl3 MFC set to  0.000000
3/17/2011	9:34:15 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:34:15 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:34:15 AM	Tube furnace set to 0
3/17/2011	9:35:15 AM	Helium valve closed
3/17/2011	9:35:15 AM	H2 valve closed
3/17/2011	9:35:15 AM	BCl3 valve closed
3/17/2011	9:35:15 AM	PH3 valve closed
3/17/2011	9:35:15 AM	SiCl4 pre valve closed
3/17/2011	9:35:15 AM	SiCl4 post valve closed
3/17/2011	9:35:15 AM	Bubbler valve closed
3/17/2011	9:35:15 AM	Main Vac valve opened
3/17/2011	9:35:15 AM	Bypass valve opened
3/17/2011	9:35:15 AM	Helium MFC set to  0.000000
3/17/2011	9:35:15 AM	H2 MFC set to  0.000000
3/17/2011	9:35:15 AM	BCl3 MFC set to  0.000000
3/17/2011	9:35:15 AM	PHl3 MFC set to  0.000000
3/17/2011	9:35:15 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:35:15 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:35:15 AM	Tube furnace set to 0
3/17/2011	9:36:15 AM	H2 valve closed
3/17/2011	9:36:15 AM	BCl3 valve closed
3/17/2011	9:36:15 AM	PH3 valve closed
3/17/2011	9:36:15 AM	SiCl4 pre valve closed
3/17/2011	9:36:15 AM	SiCl4 post valve closed
3/17/2011	9:36:15 AM	Bubbler valve closed
3/17/2011	9:36:15 AM	Helium valve opened
3/17/2011	9:36:15 AM	Main Vac valve opened
3/17/2011	9:36:15 AM	Bypass valve opened
3/17/2011	9:36:15 AM	Helium MFC set to  100.000000
3/17/2011	9:36:15 AM	H2 MFC set to  0.000000
3/17/2011	9:36:15 AM	BCl3 MFC set to  0.000000
3/17/2011	9:36:15 AM	PHl3 MFC set to  0.000000
3/17/2011	9:36:15 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:36:15 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:36:15 AM	Tube furnace set to 0
3/17/2011	9:37:16 AM	Helium valve closed
3/17/2011	9:37:16 AM	H2 valve closed
3/17/2011	9:37:16 AM	BCl3 valve closed
3/17/2011	9:37:16 AM	PH3 valve closed
3/17/2011	9:37:16 AM	SiCl4 pre valve closed
3/17/2011	9:37:16 AM	SiCl4 post valve closed
3/17/2011	9:37:16 AM	Bubbler valve closed
3/17/2011	9:37:16 AM	Main Vac valve opened
3/17/2011	9:37:16 AM	Bypass valve opened
3/17/2011	9:37:16 AM	Helium MFC set to  0.000000
3/17/2011	9:37:16 AM	H2 MFC set to  0.000000
3/17/2011	9:37:16 AM	BCl3 MFC set to  0.000000
3/17/2011	9:37:16 AM	PHl3 MFC set to  0.000000
3/17/2011	9:37:16 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:37:16 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:37:16 AM	Tube furnace set to 0
3/17/2011	9:38:16 AM	H2 valve closed
3/17/2011	9:38:16 AM	BCl3 valve closed
3/17/2011	9:38:16 AM	PH3 valve closed
3/17/2011	9:38:16 AM	SiCl4 pre valve closed
3/17/2011	9:38:16 AM	SiCl4 post valve closed
3/17/2011	9:38:16 AM	Bubbler valve closed
3/17/2011	9:38:16 AM	Helium valve opened
3/17/2011	9:38:16 AM	Main Vac valve opened
3/17/2011	9:38:16 AM	Bypass valve opened
3/17/2011	9:38:16 AM	Helium MFC set to  100.000000
3/17/2011	9:38:16 AM	H2 MFC set to  0.000000
3/17/2011	9:38:16 AM	BCl3 MFC set to  0.000000
3/17/2011	9:38:16 AM	PHl3 MFC set to  0.000000
3/17/2011	9:38:16 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:38:16 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:38:16 AM	Tube furnace set to 0
3/17/2011	9:39:16 AM	Helium valve closed
3/17/2011	9:39:16 AM	H2 valve closed
3/17/2011	9:39:16 AM	BCl3 valve closed
3/17/2011	9:39:16 AM	PH3 valve closed
3/17/2011	9:39:16 AM	SiCl4 pre valve closed
3/17/2011	9:39:16 AM	SiCl4 post valve closed
3/17/2011	9:39:16 AM	Bubbler valve closed
3/17/2011	9:39:16 AM	Main Vac valve opened
3/17/2011	9:39:16 AM	Bypass valve opened
3/17/2011	9:39:16 AM	Helium MFC set to  0.000000
3/17/2011	9:39:16 AM	H2 MFC set to  0.000000
3/17/2011	9:39:16 AM	BCl3 MFC set to  0.000000
3/17/2011	9:39:16 AM	PHl3 MFC set to  0.000000
3/17/2011	9:39:16 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:39:16 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:39:16 AM	Tube furnace set to 0
3/17/2011	9:39:17 AM	Run finished at 9:39 AM
3/17/2011	9:39:17 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	9:44:53 AM	Main Vac valve closed
3/17/2011	9:45:05 AM	Main Vac valve opened
3/17/2011	9:45:19 AM	Helium MFC set to  100.000000
3/17/2011	9:45:25 AM	Helium valve opened
3/17/2011	9:45:36 AM	Helium valve closed
3/17/2011	9:46:51 AM	Recipe started at 9:46 AM
3/17/2011	9:46:51 AM	Helium valve closed
3/17/2011	9:46:51 AM	BCl3 valve closed
3/17/2011	9:46:51 AM	PH3 valve closed
3/17/2011	9:46:51 AM	SiCl4 pre valve closed
3/17/2011	9:46:51 AM	SiCl4 post valve closed
3/17/2011	9:46:51 AM	Main Vac valve closed
3/17/2011	9:46:51 AM	Bypass valve closed
3/17/2011	9:46:51 AM	Bubbler valve closed
3/17/2011	9:46:51 AM	H2 valve opened
3/17/2011	9:46:52 AM	Helium MFC set to  0.000000
3/17/2011	9:46:52 AM	H2 MFC set to  500.000000
3/17/2011	9:46:52 AM	BCl3 MFC set to  0.000000
3/17/2011	9:46:52 AM	PHl3 MFC set to  0.000000
3/17/2011	9:46:52 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:46:52 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:46:52 AM	Tube furnace set to 0
3/17/2011	9:48:14 AM	Helium valve closed
3/17/2011	9:48:14 AM	BCl3 valve closed
3/17/2011	9:48:14 AM	PH3 valve closed
3/17/2011	9:48:14 AM	SiCl4 pre valve closed
3/17/2011	9:48:14 AM	SiCl4 post valve closed
3/17/2011	9:48:14 AM	Main Vac valve closed
3/17/2011	9:48:14 AM	Bypass valve closed
3/17/2011	9:48:14 AM	H2 valve opened
3/17/2011	9:48:14 AM	Bubbler valve opened
3/17/2011	9:48:14 AM	Helium MFC set to  0.000000
3/17/2011	9:48:14 AM	H2 MFC set to  500.000000
3/17/2011	9:48:14 AM	BCl3 MFC set to  0.000000
3/17/2011	9:48:14 AM	PHl3 MFC set to  0.000000
3/17/2011	9:48:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	9:48:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	9:48:14 AM	Tube furnace set to 1000
3/17/2011	10:08:14 AM	Helium valve closed
3/17/2011	10:08:14 AM	PH3 valve closed
3/17/2011	10:08:14 AM	Main Vac valve closed
3/17/2011	10:08:14 AM	Bypass valve closed
3/17/2011	10:08:14 AM	H2 valve opened
3/17/2011	10:08:14 AM	BCl3 valve opened
3/17/2011	10:08:14 AM	SiCl4 pre valve opened
3/17/2011	10:08:14 AM	SiCl4 post valve opened
3/17/2011	10:08:14 AM	Bubbler valve opened
3/17/2011	10:08:14 AM	Helium MFC set to  0.000000
3/17/2011	10:08:14 AM	H2 MFC set to  500.000000
3/17/2011	10:08:14 AM	BCl3 MFC set to  3.000000
3/17/2011	10:08:14 AM	PHl3 MFC set to  0.000000
3/17/2011	10:08:14 AM	SiCl4 MFC set to  50.000000
3/17/2011	10:08:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:08:14 AM	Tube furnace set to 1000
3/17/2011	10:28:14 AM	H2 valve closed
3/17/2011	10:28:14 AM	BCl3 valve closed
3/17/2011	10:28:14 AM	PH3 valve closed
3/17/2011	10:28:14 AM	SiCl4 pre valve closed
3/17/2011	10:28:14 AM	SiCl4 post valve closed
3/17/2011	10:28:14 AM	Main Vac valve closed
3/17/2011	10:28:14 AM	Bypass valve closed
3/17/2011	10:28:14 AM	Helium valve opened
3/17/2011	10:28:14 AM	Bubbler valve opened
3/17/2011	10:28:14 AM	Helium MFC set to  500.000000
3/17/2011	10:28:14 AM	H2 MFC set to  0.000000
3/17/2011	10:28:14 AM	BCl3 MFC set to  0.000000
3/17/2011	10:28:14 AM	PHl3 MFC set to  0.000000
3/17/2011	10:28:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:28:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:28:14 AM	Tube furnace set to 0
3/17/2011	10:48:14 AM	Helium valve closed
3/17/2011	10:48:14 AM	H2 valve closed
3/17/2011	10:48:14 AM	BCl3 valve closed
3/17/2011	10:48:14 AM	PH3 valve closed
3/17/2011	10:48:14 AM	SiCl4 pre valve closed
3/17/2011	10:48:14 AM	SiCl4 post valve closed
3/17/2011	10:48:14 AM	Main Vac valve closed
3/17/2011	10:48:14 AM	Bypass valve closed
3/17/2011	10:48:14 AM	Bubbler valve closed
3/17/2011	10:48:14 AM	Helium MFC set to  0.000000
3/17/2011	10:48:14 AM	H2 MFC set to  0.000000
3/17/2011	10:48:14 AM	BCl3 MFC set to  0.000000
3/17/2011	10:48:14 AM	PHl3 MFC set to  0.000000
3/17/2011	10:48:14 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:48:14 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:48:14 AM	Tube furnace set to 0
3/17/2011	10:48:15 AM	Run finished at 10:48 AM
3/17/2011	10:49:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	10:49:23 AM	Recipe started at 10:49 AM
3/17/2011	10:49:23 AM	Helium valve closed
3/17/2011	10:49:23 AM	H2 valve closed
3/17/2011	10:49:23 AM	BCl3 valve closed
3/17/2011	10:49:23 AM	PH3 valve closed
3/17/2011	10:49:23 AM	SiCl4 pre valve closed
3/17/2011	10:49:23 AM	SiCl4 post valve closed
3/17/2011	10:49:23 AM	Main Vac valve closed
3/17/2011	10:49:23 AM	Bubbler valve closed
3/17/2011	10:49:23 AM	Bypass valve opened
3/17/2011	10:49:23 AM	Helium MFC set to  0.000000
3/17/2011	10:49:23 AM	H2 MFC set to  0.000000
3/17/2011	10:49:23 AM	BCl3 MFC set to  0.000000
3/17/2011	10:49:23 AM	PHl3 MFC set to  0.000000
3/17/2011	10:49:23 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:49:23 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:49:24 AM	Tube furnace set to 0
3/17/2011	10:49:52 AM	Helium valve closed
3/17/2011	10:49:52 AM	H2 valve closed
3/17/2011	10:49:52 AM	BCl3 valve closed
3/17/2011	10:49:52 AM	PH3 valve closed
3/17/2011	10:49:52 AM	SiCl4 pre valve closed
3/17/2011	10:49:52 AM	SiCl4 post valve closed
3/17/2011	10:49:52 AM	Bubbler valve closed
3/17/2011	10:49:52 AM	Main Vac valve opened
3/17/2011	10:49:52 AM	Bypass valve opened
3/17/2011	10:49:52 AM	Helium MFC set to  0.000000
3/17/2011	10:49:52 AM	H2 MFC set to  0.000000
3/17/2011	10:49:52 AM	BCl3 MFC set to  0.000000
3/17/2011	10:49:52 AM	PHl3 MFC set to  0.000000
3/17/2011	10:49:52 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:49:52 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:49:52 AM	Tube furnace set to 0
3/17/2011	10:50:52 AM	H2 valve closed
3/17/2011	10:50:52 AM	BCl3 valve closed
3/17/2011	10:50:52 AM	PH3 valve closed
3/17/2011	10:50:52 AM	SiCl4 pre valve closed
3/17/2011	10:50:52 AM	SiCl4 post valve closed
3/17/2011	10:50:52 AM	Bubbler valve closed
3/17/2011	10:50:52 AM	Helium valve opened
3/17/2011	10:50:52 AM	Main Vac valve opened
3/17/2011	10:50:52 AM	Bypass valve opened
3/17/2011	10:50:52 AM	Helium MFC set to  100.000000
3/17/2011	10:50:52 AM	H2 MFC set to  0.000000
3/17/2011	10:50:52 AM	BCl3 MFC set to  0.000000
3/17/2011	10:50:52 AM	PHl3 MFC set to  0.000000
3/17/2011	10:50:52 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:50:52 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:50:52 AM	Tube furnace set to 0
3/17/2011	10:51:52 AM	Helium valve closed
3/17/2011	10:51:52 AM	H2 valve closed
3/17/2011	10:51:52 AM	BCl3 valve closed
3/17/2011	10:51:52 AM	PH3 valve closed
3/17/2011	10:51:52 AM	SiCl4 pre valve closed
3/17/2011	10:51:52 AM	SiCl4 post valve closed
3/17/2011	10:51:52 AM	Bubbler valve closed
3/17/2011	10:51:52 AM	Main Vac valve opened
3/17/2011	10:51:52 AM	Bypass valve opened
3/17/2011	10:51:52 AM	Helium MFC set to  0.000000
3/17/2011	10:51:52 AM	H2 MFC set to  0.000000
3/17/2011	10:51:52 AM	BCl3 MFC set to  0.000000
3/17/2011	10:51:53 AM	PHl3 MFC set to  0.000000
3/17/2011	10:51:53 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:51:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:51:53 AM	Tube furnace set to 0
3/17/2011	10:52:53 AM	H2 valve closed
3/17/2011	10:52:53 AM	BCl3 valve closed
3/17/2011	10:52:53 AM	PH3 valve closed
3/17/2011	10:52:53 AM	SiCl4 pre valve closed
3/17/2011	10:52:53 AM	SiCl4 post valve closed
3/17/2011	10:52:53 AM	Bubbler valve closed
3/17/2011	10:52:53 AM	Helium valve opened
3/17/2011	10:52:53 AM	Main Vac valve opened
3/17/2011	10:52:53 AM	Bypass valve opened
3/17/2011	10:52:53 AM	Helium MFC set to  100.000000
3/17/2011	10:52:53 AM	H2 MFC set to  0.000000
3/17/2011	10:52:53 AM	BCl3 MFC set to  0.000000
3/17/2011	10:52:53 AM	PHl3 MFC set to  0.000000
3/17/2011	10:52:53 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:52:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:52:53 AM	Tube furnace set to 0
3/17/2011	10:53:53 AM	Helium valve closed
3/17/2011	10:53:53 AM	H2 valve closed
3/17/2011	10:53:53 AM	BCl3 valve closed
3/17/2011	10:53:53 AM	PH3 valve closed
3/17/2011	10:53:53 AM	SiCl4 pre valve closed
3/17/2011	10:53:53 AM	SiCl4 post valve closed
3/17/2011	10:53:53 AM	Bubbler valve closed
3/17/2011	10:53:53 AM	Main Vac valve opened
3/17/2011	10:53:53 AM	Bypass valve opened
3/17/2011	10:53:53 AM	Helium MFC set to  0.000000
3/17/2011	10:53:53 AM	H2 MFC set to  0.000000
3/17/2011	10:53:53 AM	BCl3 MFC set to  0.000000
3/17/2011	10:53:53 AM	PHl3 MFC set to  0.000000
3/17/2011	10:53:53 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:53:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:53:53 AM	Tube furnace set to 0
3/17/2011	10:54:53 AM	H2 valve closed
3/17/2011	10:54:53 AM	BCl3 valve closed
3/17/2011	10:54:53 AM	PH3 valve closed
3/17/2011	10:54:53 AM	SiCl4 pre valve closed
3/17/2011	10:54:53 AM	SiCl4 post valve closed
3/17/2011	10:54:53 AM	Bubbler valve closed
3/17/2011	10:54:53 AM	Helium valve opened
3/17/2011	10:54:53 AM	Main Vac valve opened
3/17/2011	10:54:53 AM	Bypass valve opened
3/17/2011	10:54:53 AM	Helium MFC set to  100.000000
3/17/2011	10:54:53 AM	H2 MFC set to  0.000000
3/17/2011	10:54:53 AM	BCl3 MFC set to  0.000000
3/17/2011	10:54:53 AM	PHl3 MFC set to  0.000000
3/17/2011	10:54:53 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:54:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:54:53 AM	Tube furnace set to 0
3/17/2011	10:55:53 AM	Helium valve closed
3/17/2011	10:55:53 AM	H2 valve closed
3/17/2011	10:55:53 AM	BCl3 valve closed
3/17/2011	10:55:53 AM	PH3 valve closed
3/17/2011	10:55:53 AM	SiCl4 pre valve closed
3/17/2011	10:55:53 AM	SiCl4 post valve closed
3/17/2011	10:55:53 AM	Bubbler valve closed
3/17/2011	10:55:53 AM	Main Vac valve opened
3/17/2011	10:55:53 AM	Bypass valve opened
3/17/2011	10:55:53 AM	Helium MFC set to  0.000000
3/17/2011	10:55:53 AM	H2 MFC set to  0.000000
3/17/2011	10:55:53 AM	BCl3 MFC set to  0.000000
3/17/2011	10:55:53 AM	PHl3 MFC set to  0.000000
3/17/2011	10:55:53 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:55:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:55:53 AM	Tube furnace set to 0
3/17/2011	10:56:53 AM	H2 valve closed
3/17/2011	10:56:53 AM	BCl3 valve closed
3/17/2011	10:56:53 AM	PH3 valve closed
3/17/2011	10:56:53 AM	SiCl4 pre valve closed
3/17/2011	10:56:53 AM	SiCl4 post valve closed
3/17/2011	10:56:53 AM	Bubbler valve closed
3/17/2011	10:56:53 AM	Helium valve opened
3/17/2011	10:56:53 AM	Main Vac valve opened
3/17/2011	10:56:53 AM	Bypass valve opened
3/17/2011	10:56:53 AM	Helium MFC set to  100.000000
3/17/2011	10:56:53 AM	H2 MFC set to  0.000000
3/17/2011	10:56:53 AM	BCl3 MFC set to  0.000000
3/17/2011	10:56:53 AM	PHl3 MFC set to  0.000000
3/17/2011	10:56:53 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:56:53 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:56:54 AM	Tube furnace set to 0
3/17/2011	10:57:54 AM	Helium valve closed
3/17/2011	10:57:54 AM	H2 valve closed
3/17/2011	10:57:54 AM	BCl3 valve closed
3/17/2011	10:57:54 AM	PH3 valve closed
3/17/2011	10:57:54 AM	SiCl4 pre valve closed
3/17/2011	10:57:54 AM	SiCl4 post valve closed
3/17/2011	10:57:54 AM	Bubbler valve closed
3/17/2011	10:57:54 AM	Main Vac valve opened
3/17/2011	10:57:54 AM	Bypass valve opened
3/17/2011	10:57:54 AM	Helium MFC set to  0.000000
3/17/2011	10:57:54 AM	H2 MFC set to  0.000000
3/17/2011	10:57:54 AM	BCl3 MFC set to  0.000000
3/17/2011	10:57:54 AM	PHl3 MFC set to  0.000000
3/17/2011	10:57:54 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:57:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:57:54 AM	Tube furnace set to 0
3/17/2011	10:58:54 AM	H2 valve closed
3/17/2011	10:58:54 AM	BCl3 valve closed
3/17/2011	10:58:54 AM	PH3 valve closed
3/17/2011	10:58:54 AM	SiCl4 pre valve closed
3/17/2011	10:58:54 AM	SiCl4 post valve closed
3/17/2011	10:58:54 AM	Bubbler valve closed
3/17/2011	10:58:54 AM	Helium valve opened
3/17/2011	10:58:54 AM	Main Vac valve opened
3/17/2011	10:58:54 AM	Bypass valve opened
3/17/2011	10:58:54 AM	Helium MFC set to  100.000000
3/17/2011	10:58:54 AM	H2 MFC set to  0.000000
3/17/2011	10:58:54 AM	BCl3 MFC set to  0.000000
3/17/2011	10:58:54 AM	PHl3 MFC set to  0.000000
3/17/2011	10:58:54 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:58:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:58:54 AM	Tube furnace set to 0
3/17/2011	10:59:54 AM	Helium valve closed
3/17/2011	10:59:54 AM	H2 valve closed
3/17/2011	10:59:54 AM	BCl3 valve closed
3/17/2011	10:59:54 AM	PH3 valve closed
3/17/2011	10:59:54 AM	SiCl4 pre valve closed
3/17/2011	10:59:54 AM	SiCl4 post valve closed
3/17/2011	10:59:54 AM	Bubbler valve closed
3/17/2011	10:59:54 AM	Main Vac valve opened
3/17/2011	10:59:54 AM	Bypass valve opened
3/17/2011	10:59:54 AM	Helium MFC set to  0.000000
3/17/2011	10:59:54 AM	H2 MFC set to  0.000000
3/17/2011	10:59:54 AM	BCl3 MFC set to  0.000000
3/17/2011	10:59:54 AM	PHl3 MFC set to  0.000000
3/17/2011	10:59:54 AM	SiCl4 MFC set to  0.000000
3/17/2011	10:59:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	10:59:54 AM	Tube furnace set to 0
3/17/2011	11:00:54 AM	H2 valve closed
3/17/2011	11:00:54 AM	BCl3 valve closed
3/17/2011	11:00:54 AM	PH3 valve closed
3/17/2011	11:00:54 AM	SiCl4 pre valve closed
3/17/2011	11:00:54 AM	SiCl4 post valve closed
3/17/2011	11:00:54 AM	Bubbler valve closed
3/17/2011	11:00:54 AM	Helium valve opened
3/17/2011	11:00:54 AM	Main Vac valve opened
3/17/2011	11:00:54 AM	Bypass valve opened
3/17/2011	11:00:54 AM	Helium MFC set to  100.000000
3/17/2011	11:00:54 AM	H2 MFC set to  0.000000
3/17/2011	11:00:54 AM	BCl3 MFC set to  0.000000
3/17/2011	11:00:54 AM	PHl3 MFC set to  0.000000
3/17/2011	11:00:54 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:00:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:00:54 AM	Tube furnace set to 0
3/17/2011	11:01:54 AM	Helium valve closed
3/17/2011	11:01:54 AM	H2 valve closed
3/17/2011	11:01:54 AM	BCl3 valve closed
3/17/2011	11:01:54 AM	PH3 valve closed
3/17/2011	11:01:54 AM	SiCl4 pre valve closed
3/17/2011	11:01:54 AM	SiCl4 post valve closed
3/17/2011	11:01:54 AM	Bubbler valve closed
3/17/2011	11:01:54 AM	Main Vac valve opened
3/17/2011	11:01:54 AM	Bypass valve opened
3/17/2011	11:01:54 AM	Helium MFC set to  0.000000
3/17/2011	11:01:54 AM	H2 MFC set to  0.000000
3/17/2011	11:01:54 AM	BCl3 MFC set to  0.000000
3/17/2011	11:01:54 AM	PHl3 MFC set to  0.000000
3/17/2011	11:01:54 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:01:54 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:01:55 AM	Tube furnace set to 0
3/17/2011	11:02:55 AM	H2 valve closed
3/17/2011	11:02:55 AM	BCl3 valve closed
3/17/2011	11:02:55 AM	PH3 valve closed
3/17/2011	11:02:55 AM	SiCl4 pre valve closed
3/17/2011	11:02:55 AM	SiCl4 post valve closed
3/17/2011	11:02:55 AM	Bubbler valve closed
3/17/2011	11:02:55 AM	Helium valve opened
3/17/2011	11:02:55 AM	Main Vac valve opened
3/17/2011	11:02:55 AM	Bypass valve opened
3/17/2011	11:02:55 AM	Helium MFC set to  100.000000
3/17/2011	11:02:55 AM	H2 MFC set to  0.000000
3/17/2011	11:02:55 AM	BCl3 MFC set to  0.000000
3/17/2011	11:02:55 AM	PHl3 MFC set to  0.000000
3/17/2011	11:02:55 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:02:55 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:02:55 AM	Tube furnace set to 0
3/17/2011	11:03:55 AM	Helium valve closed
3/17/2011	11:03:55 AM	H2 valve closed
3/17/2011	11:03:55 AM	BCl3 valve closed
3/17/2011	11:03:55 AM	PH3 valve closed
3/17/2011	11:03:55 AM	SiCl4 pre valve closed
3/17/2011	11:03:55 AM	SiCl4 post valve closed
3/17/2011	11:03:55 AM	Bubbler valve closed
3/17/2011	11:03:55 AM	Main Vac valve opened
3/17/2011	11:03:55 AM	Bypass valve opened
3/17/2011	11:03:55 AM	Helium MFC set to  0.000000
3/17/2011	11:03:55 AM	H2 MFC set to  0.000000
3/17/2011	11:03:55 AM	BCl3 MFC set to  0.000000
3/17/2011	11:03:55 AM	PHl3 MFC set to  0.000000
3/17/2011	11:03:55 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:03:55 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:03:55 AM	Tube furnace set to 0
3/17/2011	11:04:55 AM	H2 valve closed
3/17/2011	11:04:55 AM	BCl3 valve closed
3/17/2011	11:04:55 AM	PH3 valve closed
3/17/2011	11:04:55 AM	SiCl4 pre valve closed
3/17/2011	11:04:55 AM	SiCl4 post valve closed
3/17/2011	11:04:55 AM	Bubbler valve closed
3/17/2011	11:04:55 AM	Helium valve opened
3/17/2011	11:04:55 AM	Main Vac valve opened
3/17/2011	11:04:55 AM	Bypass valve opened
3/17/2011	11:04:55 AM	Helium MFC set to  100.000000
3/17/2011	11:04:55 AM	H2 MFC set to  0.000000
3/17/2011	11:04:55 AM	BCl3 MFC set to  0.000000
3/17/2011	11:04:55 AM	PHl3 MFC set to  0.000000
3/17/2011	11:04:55 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:04:55 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:04:55 AM	Tube furnace set to 0
3/17/2011	11:05:55 AM	Helium valve closed
3/17/2011	11:05:55 AM	H2 valve closed
3/17/2011	11:05:55 AM	BCl3 valve closed
3/17/2011	11:05:55 AM	PH3 valve closed
3/17/2011	11:05:55 AM	SiCl4 pre valve closed
3/17/2011	11:05:55 AM	SiCl4 post valve closed
3/17/2011	11:05:55 AM	Bubbler valve closed
3/17/2011	11:05:55 AM	Main Vac valve opened
3/17/2011	11:05:55 AM	Bypass valve opened
3/17/2011	11:05:55 AM	Helium MFC set to  0.000000
3/17/2011	11:05:55 AM	H2 MFC set to  0.000000
3/17/2011	11:05:55 AM	BCl3 MFC set to  0.000000
3/17/2011	11:05:55 AM	PHl3 MFC set to  0.000000
3/17/2011	11:05:55 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:05:55 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:05:55 AM	Tube furnace set to 0
3/17/2011	11:06:55 AM	H2 valve closed
3/17/2011	11:06:55 AM	BCl3 valve closed
3/17/2011	11:06:55 AM	PH3 valve closed
3/17/2011	11:06:55 AM	SiCl4 pre valve closed
3/17/2011	11:06:55 AM	SiCl4 post valve closed
3/17/2011	11:06:55 AM	Bubbler valve closed
3/17/2011	11:06:55 AM	Helium valve opened
3/17/2011	11:06:55 AM	Main Vac valve opened
3/17/2011	11:06:55 AM	Bypass valve opened
3/17/2011	11:06:55 AM	Helium MFC set to  100.000000
3/17/2011	11:06:55 AM	H2 MFC set to  0.000000
3/17/2011	11:06:55 AM	BCl3 MFC set to  0.000000
3/17/2011	11:06:55 AM	PHl3 MFC set to  0.000000
3/17/2011	11:06:55 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:06:55 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:06:56 AM	Tube furnace set to 0
3/17/2011	11:07:56 AM	Helium valve closed
3/17/2011	11:07:56 AM	H2 valve closed
3/17/2011	11:07:56 AM	BCl3 valve closed
3/17/2011	11:07:56 AM	PH3 valve closed
3/17/2011	11:07:56 AM	SiCl4 pre valve closed
3/17/2011	11:07:56 AM	SiCl4 post valve closed
3/17/2011	11:07:56 AM	Bubbler valve closed
3/17/2011	11:07:56 AM	Main Vac valve opened
3/17/2011	11:07:56 AM	Bypass valve opened
3/17/2011	11:07:56 AM	Helium MFC set to  0.000000
3/17/2011	11:07:56 AM	H2 MFC set to  0.000000
3/17/2011	11:07:56 AM	BCl3 MFC set to  0.000000
3/17/2011	11:07:56 AM	PHl3 MFC set to  0.000000
3/17/2011	11:07:56 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:07:56 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:07:56 AM	Tube furnace set to 0
3/17/2011	11:08:56 AM	H2 valve closed
3/17/2011	11:08:56 AM	BCl3 valve closed
3/17/2011	11:08:56 AM	PH3 valve closed
3/17/2011	11:08:56 AM	SiCl4 pre valve closed
3/17/2011	11:08:56 AM	SiCl4 post valve closed
3/17/2011	11:08:56 AM	Bubbler valve closed
3/17/2011	11:08:56 AM	Helium valve opened
3/17/2011	11:08:56 AM	Main Vac valve opened
3/17/2011	11:08:56 AM	Bypass valve opened
3/17/2011	11:08:56 AM	Helium MFC set to  100.000000
3/17/2011	11:08:56 AM	H2 MFC set to  0.000000
3/17/2011	11:08:56 AM	BCl3 MFC set to  0.000000
3/17/2011	11:08:56 AM	PHl3 MFC set to  0.000000
3/17/2011	11:08:56 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:08:56 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:08:56 AM	Tube furnace set to 0
3/17/2011	11:09:56 AM	Helium valve closed
3/17/2011	11:09:56 AM	H2 valve closed
3/17/2011	11:09:56 AM	BCl3 valve closed
3/17/2011	11:09:56 AM	PH3 valve closed
3/17/2011	11:09:56 AM	SiCl4 pre valve closed
3/17/2011	11:09:56 AM	SiCl4 post valve closed
3/17/2011	11:09:56 AM	Bubbler valve closed
3/17/2011	11:09:56 AM	Main Vac valve opened
3/17/2011	11:09:56 AM	Bypass valve opened
3/17/2011	11:09:56 AM	Helium MFC set to  0.000000
3/17/2011	11:09:56 AM	H2 MFC set to  0.000000
3/17/2011	11:09:56 AM	BCl3 MFC set to  0.000000
3/17/2011	11:09:56 AM	PHl3 MFC set to  0.000000
3/17/2011	11:09:56 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:09:56 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:09:56 AM	Tube furnace set to 0
3/17/2011	11:09:57 AM	Run finished at 11:09 AM
3/17/2011	11:09:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	11:20:07 AM	Recipe started at 11:20 AM
3/17/2011	11:20:07 AM	Helium valve closed
3/17/2011	11:20:07 AM	BCl3 valve closed
3/17/2011	11:20:07 AM	PH3 valve closed
3/17/2011	11:20:07 AM	SiCl4 pre valve closed
3/17/2011	11:20:07 AM	SiCl4 post valve closed
3/17/2011	11:20:07 AM	Main Vac valve closed
3/17/2011	11:20:07 AM	Bypass valve closed
3/17/2011	11:20:07 AM	Bubbler valve closed
3/17/2011	11:20:07 AM	H2 valve opened
3/17/2011	11:20:07 AM	Helium MFC set to  0.000000
3/17/2011	11:20:07 AM	H2 MFC set to  500.000000
3/17/2011	11:20:07 AM	BCl3 MFC set to  0.000000
3/17/2011	11:20:07 AM	PHl3 MFC set to  0.000000
3/17/2011	11:20:07 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:20:07 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:20:07 AM	Tube furnace set to 0
3/17/2011	11:21:29 AM	Helium valve closed
3/17/2011	11:21:29 AM	BCl3 valve closed
3/17/2011	11:21:29 AM	PH3 valve closed
3/17/2011	11:21:29 AM	SiCl4 pre valve closed
3/17/2011	11:21:29 AM	SiCl4 post valve closed
3/17/2011	11:21:29 AM	Main Vac valve closed
3/17/2011	11:21:29 AM	Bypass valve closed
3/17/2011	11:21:29 AM	H2 valve opened
3/17/2011	11:21:29 AM	Bubbler valve opened
3/17/2011	11:21:29 AM	Helium MFC set to  0.000000
3/17/2011	11:21:29 AM	H2 MFC set to  500.000000
3/17/2011	11:21:29 AM	BCl3 MFC set to  0.000000
3/17/2011	11:21:29 AM	PHl3 MFC set to  0.000000
3/17/2011	11:21:29 AM	SiCl4 MFC set to  0.000000
3/17/2011	11:21:29 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:21:29 AM	Tube furnace set to 1000
3/17/2011	11:41:29 AM	Helium valve closed
3/17/2011	11:41:29 AM	PH3 valve closed
3/17/2011	11:41:29 AM	Main Vac valve closed
3/17/2011	11:41:29 AM	Bypass valve closed
3/17/2011	11:41:29 AM	H2 valve opened
3/17/2011	11:41:29 AM	BCl3 valve opened
3/17/2011	11:41:29 AM	SiCl4 pre valve opened
3/17/2011	11:41:29 AM	SiCl4 post valve opened
3/17/2011	11:41:29 AM	Bubbler valve opened
3/17/2011	11:41:29 AM	Helium MFC set to  0.000000
3/17/2011	11:41:29 AM	H2 MFC set to  500.000000
3/17/2011	11:41:29 AM	BCl3 MFC set to  3.000000
3/17/2011	11:41:29 AM	PHl3 MFC set to  0.000000
3/17/2011	11:41:29 AM	SiCl4 MFC set to  50.000000
3/17/2011	11:41:29 AM	Bypass solenoid MFC set to  0.000000
3/17/2011	11:41:29 AM	Tube furnace set to 1000
3/17/2011	12:01:29 PM	H2 valve closed
3/17/2011	12:01:29 PM	BCl3 valve closed
3/17/2011	12:01:29 PM	PH3 valve closed
3/17/2011	12:01:29 PM	SiCl4 pre valve closed
3/17/2011	12:01:29 PM	SiCl4 post valve closed
3/17/2011	12:01:29 PM	Main Vac valve closed
3/17/2011	12:01:29 PM	Bypass valve closed
3/17/2011	12:01:29 PM	Helium valve opened
3/17/2011	12:01:29 PM	Bubbler valve opened
3/17/2011	12:01:29 PM	Helium MFC set to  500.000000
3/17/2011	12:01:29 PM	H2 MFC set to  0.000000
3/17/2011	12:01:29 PM	BCl3 MFC set to  0.000000
3/17/2011	12:01:29 PM	PHl3 MFC set to  0.000000
3/17/2011	12:01:29 PM	SiCl4 MFC set to  0.000000
3/17/2011	12:01:29 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	12:01:29 PM	Tube furnace set to 0
3/17/2011	12:21:29 PM	Helium valve closed
3/17/2011	12:21:29 PM	H2 valve closed
3/17/2011	12:21:29 PM	BCl3 valve closed
3/17/2011	12:21:29 PM	PH3 valve closed
3/17/2011	12:21:29 PM	SiCl4 pre valve closed
3/17/2011	12:21:29 PM	SiCl4 post valve closed
3/17/2011	12:21:29 PM	Main Vac valve closed
3/17/2011	12:21:29 PM	Bypass valve closed
3/17/2011	12:21:29 PM	Bubbler valve closed
3/17/2011	12:21:29 PM	Helium MFC set to  0.000000
3/17/2011	12:21:29 PM	H2 MFC set to  0.000000
3/17/2011	12:21:29 PM	BCl3 MFC set to  0.000000
3/17/2011	12:21:29 PM	PHl3 MFC set to  0.000000
3/17/2011	12:21:29 PM	SiCl4 MFC set to  0.000000
3/17/2011	12:21:29 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	12:21:29 PM	Tube furnace set to 0
3/17/2011	12:21:29 PM	Run finished at 12:21 PM
3/17/2011	1:30:48 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	1:30:59 PM	Recipe started at 1:30 PM
3/17/2011	1:31:00 PM	Helium valve closed
3/17/2011	1:31:00 PM	H2 valve closed
3/17/2011	1:31:00 PM	BCl3 valve closed
3/17/2011	1:31:00 PM	PH3 valve closed
3/17/2011	1:31:00 PM	SiCl4 pre valve closed
3/17/2011	1:31:00 PM	SiCl4 post valve closed
3/17/2011	1:31:00 PM	Main Vac valve closed
3/17/2011	1:31:00 PM	Bubbler valve closed
3/17/2011	1:31:00 PM	Bypass valve opened
3/17/2011	1:31:00 PM	Helium MFC set to  0.000000
3/17/2011	1:31:00 PM	H2 MFC set to  0.000000
3/17/2011	1:31:00 PM	BCl3 MFC set to  0.000000
3/17/2011	1:31:00 PM	PHl3 MFC set to  0.000000
3/17/2011	1:31:00 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:31:00 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:31:00 PM	Tube furnace set to 0
3/17/2011	1:31:32 PM	Helium valve closed
3/17/2011	1:31:32 PM	H2 valve closed
3/17/2011	1:31:32 PM	BCl3 valve closed
3/17/2011	1:31:32 PM	PH3 valve closed
3/17/2011	1:31:32 PM	SiCl4 pre valve closed
3/17/2011	1:31:32 PM	SiCl4 post valve closed
3/17/2011	1:31:32 PM	Bubbler valve closed
3/17/2011	1:31:32 PM	Main Vac valve opened
3/17/2011	1:31:32 PM	Bypass valve opened
3/17/2011	1:31:32 PM	Helium MFC set to  0.000000
3/17/2011	1:31:32 PM	H2 MFC set to  0.000000
3/17/2011	1:31:32 PM	BCl3 MFC set to  0.000000
3/17/2011	1:31:33 PM	PHl3 MFC set to  0.000000
3/17/2011	1:31:33 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:31:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:31:33 PM	Tube furnace set to 0
3/17/2011	1:32:33 PM	H2 valve closed
3/17/2011	1:32:33 PM	BCl3 valve closed
3/17/2011	1:32:33 PM	PH3 valve closed
3/17/2011	1:32:33 PM	SiCl4 pre valve closed
3/17/2011	1:32:33 PM	SiCl4 post valve closed
3/17/2011	1:32:33 PM	Bubbler valve closed
3/17/2011	1:32:33 PM	Helium valve opened
3/17/2011	1:32:33 PM	Main Vac valve opened
3/17/2011	1:32:33 PM	Bypass valve opened
3/17/2011	1:32:33 PM	Helium MFC set to  100.000000
3/17/2011	1:32:33 PM	H2 MFC set to  0.000000
3/17/2011	1:32:33 PM	BCl3 MFC set to  0.000000
3/17/2011	1:32:33 PM	PHl3 MFC set to  0.000000
3/17/2011	1:32:33 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:32:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:32:33 PM	Tube furnace set to 0
3/17/2011	1:33:33 PM	Helium valve closed
3/17/2011	1:33:33 PM	H2 valve closed
3/17/2011	1:33:33 PM	BCl3 valve closed
3/17/2011	1:33:33 PM	PH3 valve closed
3/17/2011	1:33:33 PM	SiCl4 pre valve closed
3/17/2011	1:33:33 PM	SiCl4 post valve closed
3/17/2011	1:33:33 PM	Bubbler valve closed
3/17/2011	1:33:33 PM	Main Vac valve opened
3/17/2011	1:33:33 PM	Bypass valve opened
3/17/2011	1:33:33 PM	Helium MFC set to  0.000000
3/17/2011	1:33:33 PM	H2 MFC set to  0.000000
3/17/2011	1:33:33 PM	BCl3 MFC set to  0.000000
3/17/2011	1:33:33 PM	PHl3 MFC set to  0.000000
3/17/2011	1:33:33 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:33:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:33:33 PM	Tube furnace set to 0
3/17/2011	1:34:33 PM	H2 valve closed
3/17/2011	1:34:33 PM	BCl3 valve closed
3/17/2011	1:34:33 PM	PH3 valve closed
3/17/2011	1:34:33 PM	SiCl4 pre valve closed
3/17/2011	1:34:33 PM	SiCl4 post valve closed
3/17/2011	1:34:33 PM	Bubbler valve closed
3/17/2011	1:34:33 PM	Helium valve opened
3/17/2011	1:34:33 PM	Main Vac valve opened
3/17/2011	1:34:33 PM	Bypass valve opened
3/17/2011	1:34:33 PM	Helium MFC set to  100.000000
3/17/2011	1:34:33 PM	H2 MFC set to  0.000000
3/17/2011	1:34:33 PM	BCl3 MFC set to  0.000000
3/17/2011	1:34:33 PM	PHl3 MFC set to  0.000000
3/17/2011	1:34:33 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:34:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:34:33 PM	Tube furnace set to 0
3/17/2011	1:35:33 PM	Helium valve closed
3/17/2011	1:35:33 PM	H2 valve closed
3/17/2011	1:35:33 PM	BCl3 valve closed
3/17/2011	1:35:33 PM	PH3 valve closed
3/17/2011	1:35:33 PM	SiCl4 pre valve closed
3/17/2011	1:35:33 PM	SiCl4 post valve closed
3/17/2011	1:35:33 PM	Bubbler valve closed
3/17/2011	1:35:33 PM	Main Vac valve opened
3/17/2011	1:35:33 PM	Bypass valve opened
3/17/2011	1:35:33 PM	Helium MFC set to  0.000000
3/17/2011	1:35:33 PM	H2 MFC set to  0.000000
3/17/2011	1:35:33 PM	BCl3 MFC set to  0.000000
3/17/2011	1:35:33 PM	PHl3 MFC set to  0.000000
3/17/2011	1:35:33 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:35:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:35:33 PM	Tube furnace set to 0
3/17/2011	1:36:33 PM	H2 valve closed
3/17/2011	1:36:33 PM	BCl3 valve closed
3/17/2011	1:36:33 PM	PH3 valve closed
3/17/2011	1:36:33 PM	SiCl4 pre valve closed
3/17/2011	1:36:33 PM	SiCl4 post valve closed
3/17/2011	1:36:33 PM	Bubbler valve closed
3/17/2011	1:36:33 PM	Helium valve opened
3/17/2011	1:36:33 PM	Main Vac valve opened
3/17/2011	1:36:33 PM	Bypass valve opened
3/17/2011	1:36:33 PM	Helium MFC set to  100.000000
3/17/2011	1:36:33 PM	H2 MFC set to  0.000000
3/17/2011	1:36:33 PM	BCl3 MFC set to  0.000000
3/17/2011	1:36:33 PM	PHl3 MFC set to  0.000000
3/17/2011	1:36:33 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:36:33 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:36:34 PM	Tube furnace set to 0
3/17/2011	1:37:34 PM	Helium valve closed
3/17/2011	1:37:34 PM	H2 valve closed
3/17/2011	1:37:34 PM	BCl3 valve closed
3/17/2011	1:37:34 PM	PH3 valve closed
3/17/2011	1:37:34 PM	SiCl4 pre valve closed
3/17/2011	1:37:34 PM	SiCl4 post valve closed
3/17/2011	1:37:34 PM	Bubbler valve closed
3/17/2011	1:37:34 PM	Main Vac valve opened
3/17/2011	1:37:34 PM	Bypass valve opened
3/17/2011	1:37:34 PM	Helium MFC set to  0.000000
3/17/2011	1:37:34 PM	H2 MFC set to  0.000000
3/17/2011	1:37:34 PM	BCl3 MFC set to  0.000000
3/17/2011	1:37:34 PM	PHl3 MFC set to  0.000000
3/17/2011	1:37:34 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:37:34 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:37:34 PM	Tube furnace set to 0
3/17/2011	1:38:34 PM	H2 valve closed
3/17/2011	1:38:34 PM	BCl3 valve closed
3/17/2011	1:38:34 PM	PH3 valve closed
3/17/2011	1:38:34 PM	SiCl4 pre valve closed
3/17/2011	1:38:34 PM	SiCl4 post valve closed
3/17/2011	1:38:34 PM	Bubbler valve closed
3/17/2011	1:38:34 PM	Helium valve opened
3/17/2011	1:38:34 PM	Main Vac valve opened
3/17/2011	1:38:34 PM	Bypass valve opened
3/17/2011	1:38:34 PM	Helium MFC set to  100.000000
3/17/2011	1:38:34 PM	H2 MFC set to  0.000000
3/17/2011	1:38:34 PM	BCl3 MFC set to  0.000000
3/17/2011	1:38:34 PM	PHl3 MFC set to  0.000000
3/17/2011	1:38:34 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:38:34 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:38:34 PM	Tube furnace set to 0
3/17/2011	1:39:34 PM	Helium valve closed
3/17/2011	1:39:34 PM	H2 valve closed
3/17/2011	1:39:34 PM	BCl3 valve closed
3/17/2011	1:39:34 PM	PH3 valve closed
3/17/2011	1:39:34 PM	SiCl4 pre valve closed
3/17/2011	1:39:34 PM	SiCl4 post valve closed
3/17/2011	1:39:34 PM	Bubbler valve closed
3/17/2011	1:39:34 PM	Main Vac valve opened
3/17/2011	1:39:34 PM	Bypass valve opened
3/17/2011	1:39:34 PM	Helium MFC set to  0.000000
3/17/2011	1:39:34 PM	H2 MFC set to  0.000000
3/17/2011	1:39:34 PM	BCl3 MFC set to  0.000000
3/17/2011	1:39:34 PM	PHl3 MFC set to  0.000000
3/17/2011	1:39:34 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:39:34 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:39:34 PM	Tube furnace set to 0
3/17/2011	1:40:34 PM	H2 valve closed
3/17/2011	1:40:34 PM	BCl3 valve closed
3/17/2011	1:40:34 PM	PH3 valve closed
3/17/2011	1:40:34 PM	SiCl4 pre valve closed
3/17/2011	1:40:34 PM	SiCl4 post valve closed
3/17/2011	1:40:34 PM	Bubbler valve closed
3/17/2011	1:40:34 PM	Helium valve opened
3/17/2011	1:40:34 PM	Main Vac valve opened
3/17/2011	1:40:34 PM	Bypass valve opened
3/17/2011	1:40:34 PM	Helium MFC set to  100.000000
3/17/2011	1:40:34 PM	H2 MFC set to  0.000000
3/17/2011	1:40:34 PM	BCl3 MFC set to  0.000000
3/17/2011	1:40:34 PM	PHl3 MFC set to  0.000000
3/17/2011	1:40:34 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:40:34 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:40:34 PM	Tube furnace set to 0
3/17/2011	1:41:34 PM	Helium valve closed
3/17/2011	1:41:34 PM	H2 valve closed
3/17/2011	1:41:34 PM	BCl3 valve closed
3/17/2011	1:41:34 PM	PH3 valve closed
3/17/2011	1:41:34 PM	SiCl4 pre valve closed
3/17/2011	1:41:34 PM	SiCl4 post valve closed
3/17/2011	1:41:34 PM	Bubbler valve closed
3/17/2011	1:41:34 PM	Main Vac valve opened
3/17/2011	1:41:34 PM	Bypass valve opened
3/17/2011	1:41:34 PM	Helium MFC set to  0.000000
3/17/2011	1:41:34 PM	H2 MFC set to  0.000000
3/17/2011	1:41:34 PM	BCl3 MFC set to  0.000000
3/17/2011	1:41:34 PM	PHl3 MFC set to  0.000000
3/17/2011	1:41:34 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:41:34 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:41:35 PM	Tube furnace set to 0
3/17/2011	1:42:35 PM	H2 valve closed
3/17/2011	1:42:35 PM	BCl3 valve closed
3/17/2011	1:42:35 PM	PH3 valve closed
3/17/2011	1:42:35 PM	SiCl4 pre valve closed
3/17/2011	1:42:35 PM	SiCl4 post valve closed
3/17/2011	1:42:35 PM	Bubbler valve closed
3/17/2011	1:42:35 PM	Helium valve opened
3/17/2011	1:42:35 PM	Main Vac valve opened
3/17/2011	1:42:35 PM	Bypass valve opened
3/17/2011	1:42:35 PM	Helium MFC set to  100.000000
3/17/2011	1:42:35 PM	H2 MFC set to  0.000000
3/17/2011	1:42:35 PM	BCl3 MFC set to  0.000000
3/17/2011	1:42:35 PM	PHl3 MFC set to  0.000000
3/17/2011	1:42:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:42:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:42:35 PM	Tube furnace set to 0
3/17/2011	1:43:35 PM	Helium valve closed
3/17/2011	1:43:35 PM	H2 valve closed
3/17/2011	1:43:35 PM	BCl3 valve closed
3/17/2011	1:43:35 PM	PH3 valve closed
3/17/2011	1:43:35 PM	SiCl4 pre valve closed
3/17/2011	1:43:35 PM	SiCl4 post valve closed
3/17/2011	1:43:35 PM	Bubbler valve closed
3/17/2011	1:43:35 PM	Main Vac valve opened
3/17/2011	1:43:35 PM	Bypass valve opened
3/17/2011	1:43:35 PM	Helium MFC set to  0.000000
3/17/2011	1:43:35 PM	H2 MFC set to  0.000000
3/17/2011	1:43:35 PM	BCl3 MFC set to  0.000000
3/17/2011	1:43:35 PM	PHl3 MFC set to  0.000000
3/17/2011	1:43:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:43:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:43:35 PM	Tube furnace set to 0
3/17/2011	1:44:35 PM	H2 valve closed
3/17/2011	1:44:35 PM	BCl3 valve closed
3/17/2011	1:44:35 PM	PH3 valve closed
3/17/2011	1:44:35 PM	SiCl4 pre valve closed
3/17/2011	1:44:35 PM	SiCl4 post valve closed
3/17/2011	1:44:35 PM	Bubbler valve closed
3/17/2011	1:44:35 PM	Helium valve opened
3/17/2011	1:44:35 PM	Main Vac valve opened
3/17/2011	1:44:35 PM	Bypass valve opened
3/17/2011	1:44:35 PM	Helium MFC set to  100.000000
3/17/2011	1:44:35 PM	H2 MFC set to  0.000000
3/17/2011	1:44:35 PM	BCl3 MFC set to  0.000000
3/17/2011	1:44:35 PM	PHl3 MFC set to  0.000000
3/17/2011	1:44:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:44:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:44:35 PM	Tube furnace set to 0
3/17/2011	1:45:35 PM	Helium valve closed
3/17/2011	1:45:35 PM	H2 valve closed
3/17/2011	1:45:35 PM	BCl3 valve closed
3/17/2011	1:45:35 PM	PH3 valve closed
3/17/2011	1:45:35 PM	SiCl4 pre valve closed
3/17/2011	1:45:35 PM	SiCl4 post valve closed
3/17/2011	1:45:35 PM	Bubbler valve closed
3/17/2011	1:45:35 PM	Main Vac valve opened
3/17/2011	1:45:35 PM	Bypass valve opened
3/17/2011	1:45:35 PM	Helium MFC set to  0.000000
3/17/2011	1:45:35 PM	H2 MFC set to  0.000000
3/17/2011	1:45:35 PM	BCl3 MFC set to  0.000000
3/17/2011	1:45:35 PM	PHl3 MFC set to  0.000000
3/17/2011	1:45:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:45:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:45:35 PM	Tube furnace set to 0
3/17/2011	1:46:35 PM	H2 valve closed
3/17/2011	1:46:35 PM	BCl3 valve closed
3/17/2011	1:46:35 PM	PH3 valve closed
3/17/2011	1:46:35 PM	SiCl4 pre valve closed
3/17/2011	1:46:35 PM	SiCl4 post valve closed
3/17/2011	1:46:35 PM	Bubbler valve closed
3/17/2011	1:46:35 PM	Helium valve opened
3/17/2011	1:46:35 PM	Main Vac valve opened
3/17/2011	1:46:35 PM	Bypass valve opened
3/17/2011	1:46:35 PM	Helium MFC set to  100.000000
3/17/2011	1:46:35 PM	H2 MFC set to  0.000000
3/17/2011	1:46:35 PM	BCl3 MFC set to  0.000000
3/17/2011	1:46:35 PM	PHl3 MFC set to  0.000000
3/17/2011	1:46:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:46:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:46:36 PM	Tube furnace set to 0
3/17/2011	1:47:36 PM	Helium valve closed
3/17/2011	1:47:36 PM	H2 valve closed
3/17/2011	1:47:36 PM	BCl3 valve closed
3/17/2011	1:47:36 PM	PH3 valve closed
3/17/2011	1:47:36 PM	SiCl4 pre valve closed
3/17/2011	1:47:36 PM	SiCl4 post valve closed
3/17/2011	1:47:36 PM	Bubbler valve closed
3/17/2011	1:47:36 PM	Main Vac valve opened
3/17/2011	1:47:36 PM	Bypass valve opened
3/17/2011	1:47:36 PM	Helium MFC set to  0.000000
3/17/2011	1:47:36 PM	H2 MFC set to  0.000000
3/17/2011	1:47:36 PM	BCl3 MFC set to  0.000000
3/17/2011	1:47:36 PM	PHl3 MFC set to  0.000000
3/17/2011	1:47:36 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:47:36 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:47:36 PM	Tube furnace set to 0
3/17/2011	1:48:36 PM	H2 valve closed
3/17/2011	1:48:36 PM	BCl3 valve closed
3/17/2011	1:48:36 PM	PH3 valve closed
3/17/2011	1:48:36 PM	SiCl4 pre valve closed
3/17/2011	1:48:36 PM	SiCl4 post valve closed
3/17/2011	1:48:36 PM	Bubbler valve closed
3/17/2011	1:48:36 PM	Helium valve opened
3/17/2011	1:48:36 PM	Main Vac valve opened
3/17/2011	1:48:36 PM	Bypass valve opened
3/17/2011	1:48:36 PM	Helium MFC set to  100.000000
3/17/2011	1:48:36 PM	H2 MFC set to  0.000000
3/17/2011	1:48:36 PM	BCl3 MFC set to  0.000000
3/17/2011	1:48:36 PM	PHl3 MFC set to  0.000000
3/17/2011	1:48:36 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:48:36 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:48:36 PM	Tube furnace set to 0
3/17/2011	1:49:36 PM	Helium valve closed
3/17/2011	1:49:36 PM	H2 valve closed
3/17/2011	1:49:36 PM	BCl3 valve closed
3/17/2011	1:49:36 PM	PH3 valve closed
3/17/2011	1:49:36 PM	SiCl4 pre valve closed
3/17/2011	1:49:36 PM	SiCl4 post valve closed
3/17/2011	1:49:36 PM	Bubbler valve closed
3/17/2011	1:49:36 PM	Main Vac valve opened
3/17/2011	1:49:36 PM	Bypass valve opened
3/17/2011	1:49:36 PM	Helium MFC set to  0.000000
3/17/2011	1:49:36 PM	H2 MFC set to  0.000000
3/17/2011	1:49:36 PM	BCl3 MFC set to  0.000000
3/17/2011	1:49:36 PM	PHl3 MFC set to  0.000000
3/17/2011	1:49:36 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:49:36 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:49:36 PM	Tube furnace set to 0
3/17/2011	1:50:36 PM	H2 valve closed
3/17/2011	1:50:36 PM	BCl3 valve closed
3/17/2011	1:50:36 PM	PH3 valve closed
3/17/2011	1:50:36 PM	SiCl4 pre valve closed
3/17/2011	1:50:36 PM	SiCl4 post valve closed
3/17/2011	1:50:36 PM	Bubbler valve closed
3/17/2011	1:50:36 PM	Helium valve opened
3/17/2011	1:50:36 PM	Main Vac valve opened
3/17/2011	1:50:36 PM	Bypass valve opened
3/17/2011	1:50:36 PM	Helium MFC set to  100.000000
3/17/2011	1:50:36 PM	H2 MFC set to  0.000000
3/17/2011	1:50:36 PM	BCl3 MFC set to  0.000000
3/17/2011	1:50:36 PM	PHl3 MFC set to  0.000000
3/17/2011	1:50:36 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:50:36 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:50:36 PM	Tube furnace set to 0
3/17/2011	1:51:36 PM	Helium valve closed
3/17/2011	1:51:36 PM	H2 valve closed
3/17/2011	1:51:36 PM	BCl3 valve closed
3/17/2011	1:51:36 PM	PH3 valve closed
3/17/2011	1:51:36 PM	SiCl4 pre valve closed
3/17/2011	1:51:36 PM	SiCl4 post valve closed
3/17/2011	1:51:36 PM	Bubbler valve closed
3/17/2011	1:51:36 PM	Main Vac valve opened
3/17/2011	1:51:36 PM	Bypass valve opened
3/17/2011	1:51:36 PM	Helium MFC set to  0.000000
3/17/2011	1:51:36 PM	H2 MFC set to  0.000000
3/17/2011	1:51:36 PM	BCl3 MFC set to  0.000000
3/17/2011	1:51:36 PM	PHl3 MFC set to  0.000000
3/17/2011	1:51:36 PM	SiCl4 MFC set to  0.000000
3/17/2011	1:51:36 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	1:51:37 PM	Tube furnace set to 0
3/17/2011	1:51:38 PM	Run finished at 1:51 PM
3/17/2011	1:51:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	2:22:29 PM	Recipe started at 2:22 PM
3/17/2011	2:22:29 PM	Helium valve closed
3/17/2011	2:22:30 PM	BCl3 valve closed
3/17/2011	2:22:30 PM	PH3 valve closed
3/17/2011	2:22:30 PM	SiCl4 pre valve closed
3/17/2011	2:22:30 PM	SiCl4 post valve closed
3/17/2011	2:22:30 PM	Main Vac valve closed
3/17/2011	2:22:30 PM	Bypass valve closed
3/17/2011	2:22:30 PM	Bubbler valve closed
3/17/2011	2:22:30 PM	H2 valve opened
3/17/2011	2:22:30 PM	Helium MFC set to  0.000000
3/17/2011	2:22:30 PM	H2 MFC set to  500.000000
3/17/2011	2:22:30 PM	BCl3 MFC set to  0.000000
3/17/2011	2:22:30 PM	PHl3 MFC set to  0.000000
3/17/2011	2:22:30 PM	SiCl4 MFC set to  0.000000
3/17/2011	2:22:30 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	2:22:30 PM	Tube furnace set to 0
3/17/2011	2:23:50 PM	Helium valve closed
3/17/2011	2:23:50 PM	BCl3 valve closed
3/17/2011	2:23:50 PM	PH3 valve closed
3/17/2011	2:23:50 PM	SiCl4 pre valve closed
3/17/2011	2:23:50 PM	SiCl4 post valve closed
3/17/2011	2:23:50 PM	Main Vac valve closed
3/17/2011	2:23:50 PM	Bypass valve closed
3/17/2011	2:23:50 PM	H2 valve opened
3/17/2011	2:23:50 PM	Bubbler valve opened
3/17/2011	2:23:50 PM	Helium MFC set to  0.000000
3/17/2011	2:23:50 PM	H2 MFC set to  500.000000
3/17/2011	2:23:50 PM	BCl3 MFC set to  0.000000
3/17/2011	2:23:50 PM	PHl3 MFC set to  0.000000
3/17/2011	2:23:50 PM	SiCl4 MFC set to  0.000000
3/17/2011	2:23:50 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	2:23:51 PM	Tube furnace set to 1000
3/17/2011	2:43:51 PM	Helium valve closed
3/17/2011	2:43:51 PM	PH3 valve closed
3/17/2011	2:43:51 PM	Main Vac valve closed
3/17/2011	2:43:51 PM	Bypass valve closed
3/17/2011	2:43:51 PM	H2 valve opened
3/17/2011	2:43:51 PM	BCl3 valve opened
3/17/2011	2:43:51 PM	SiCl4 pre valve opened
3/17/2011	2:43:51 PM	SiCl4 post valve opened
3/17/2011	2:43:51 PM	Bubbler valve opened
3/17/2011	2:43:51 PM	Helium MFC set to  0.000000
3/17/2011	2:43:51 PM	H2 MFC set to  500.000000
3/17/2011	2:43:51 PM	BCl3 MFC set to  3.000000
3/17/2011	2:43:51 PM	PHl3 MFC set to  0.000000
3/17/2011	2:43:51 PM	SiCl4 MFC set to  50.000000
3/17/2011	2:43:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	2:43:51 PM	Tube furnace set to 1000
3/17/2011	3:03:51 PM	H2 valve closed
3/17/2011	3:03:51 PM	BCl3 valve closed
3/17/2011	3:03:51 PM	PH3 valve closed
3/17/2011	3:03:51 PM	SiCl4 pre valve closed
3/17/2011	3:03:51 PM	SiCl4 post valve closed
3/17/2011	3:03:51 PM	Main Vac valve closed
3/17/2011	3:03:51 PM	Bypass valve closed
3/17/2011	3:03:51 PM	Helium valve opened
3/17/2011	3:03:51 PM	Bubbler valve opened
3/17/2011	3:03:51 PM	Helium MFC set to  500.000000
3/17/2011	3:03:51 PM	H2 MFC set to  0.000000
3/17/2011	3:03:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:03:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:03:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:03:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:03:51 PM	Tube furnace set to 0
3/17/2011	3:23:51 PM	Helium valve closed
3/17/2011	3:23:51 PM	H2 valve closed
3/17/2011	3:23:51 PM	BCl3 valve closed
3/17/2011	3:23:51 PM	PH3 valve closed
3/17/2011	3:23:51 PM	SiCl4 pre valve closed
3/17/2011	3:23:51 PM	SiCl4 post valve closed
3/17/2011	3:23:51 PM	Main Vac valve closed
3/17/2011	3:23:51 PM	Bypass valve closed
3/17/2011	3:23:51 PM	Bubbler valve closed
3/17/2011	3:23:51 PM	Helium MFC set to  0.000000
3/17/2011	3:23:51 PM	H2 MFC set to  0.000000
3/17/2011	3:23:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:23:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:23:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:23:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:23:51 PM	Tube furnace set to 0
3/17/2011	3:23:51 PM	Run finished at 3:23 PM
3/17/2011	3:35:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	3:35:18 PM	Recipe started at 3:35 PM
3/17/2011	3:35:18 PM	Helium valve closed
3/17/2011	3:35:18 PM	H2 valve closed
3/17/2011	3:35:18 PM	BCl3 valve closed
3/17/2011	3:35:18 PM	PH3 valve closed
3/17/2011	3:35:18 PM	SiCl4 pre valve closed
3/17/2011	3:35:18 PM	SiCl4 post valve closed
3/17/2011	3:35:18 PM	Main Vac valve closed
3/17/2011	3:35:18 PM	Bubbler valve closed
3/17/2011	3:35:18 PM	Bypass valve opened
3/17/2011	3:35:18 PM	Helium MFC set to  0.000000
3/17/2011	3:35:18 PM	H2 MFC set to  0.000000
3/17/2011	3:35:18 PM	BCl3 MFC set to  0.000000
3/17/2011	3:35:18 PM	PHl3 MFC set to  0.000000
3/17/2011	3:35:18 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:35:18 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:35:18 PM	Tube furnace set to 0
3/17/2011	3:35:50 PM	Helium valve closed
3/17/2011	3:35:50 PM	H2 valve closed
3/17/2011	3:35:50 PM	BCl3 valve closed
3/17/2011	3:35:50 PM	PH3 valve closed
3/17/2011	3:35:50 PM	SiCl4 pre valve closed
3/17/2011	3:35:50 PM	SiCl4 post valve closed
3/17/2011	3:35:50 PM	Bubbler valve closed
3/17/2011	3:35:50 PM	Main Vac valve opened
3/17/2011	3:35:50 PM	Bypass valve opened
3/17/2011	3:35:50 PM	Helium MFC set to  0.000000
3/17/2011	3:35:50 PM	H2 MFC set to  0.000000
3/17/2011	3:35:50 PM	BCl3 MFC set to  0.000000
3/17/2011	3:35:50 PM	PHl3 MFC set to  0.000000
3/17/2011	3:35:50 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:35:50 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:35:51 PM	Tube furnace set to 0
3/17/2011	3:36:51 PM	H2 valve closed
3/17/2011	3:36:51 PM	BCl3 valve closed
3/17/2011	3:36:51 PM	PH3 valve closed
3/17/2011	3:36:51 PM	SiCl4 pre valve closed
3/17/2011	3:36:51 PM	SiCl4 post valve closed
3/17/2011	3:36:51 PM	Bubbler valve closed
3/17/2011	3:36:51 PM	Helium valve opened
3/17/2011	3:36:51 PM	Main Vac valve opened
3/17/2011	3:36:51 PM	Bypass valve opened
3/17/2011	3:36:51 PM	Helium MFC set to  100.000000
3/17/2011	3:36:51 PM	H2 MFC set to  0.000000
3/17/2011	3:36:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:36:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:36:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:36:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:36:51 PM	Tube furnace set to 0
3/17/2011	3:37:51 PM	Helium valve closed
3/17/2011	3:37:51 PM	H2 valve closed
3/17/2011	3:37:51 PM	BCl3 valve closed
3/17/2011	3:37:51 PM	PH3 valve closed
3/17/2011	3:37:51 PM	SiCl4 pre valve closed
3/17/2011	3:37:51 PM	SiCl4 post valve closed
3/17/2011	3:37:51 PM	Bubbler valve closed
3/17/2011	3:37:51 PM	Main Vac valve opened
3/17/2011	3:37:51 PM	Bypass valve opened
3/17/2011	3:37:51 PM	Helium MFC set to  0.000000
3/17/2011	3:37:51 PM	H2 MFC set to  0.000000
3/17/2011	3:37:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:37:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:37:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:37:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:37:51 PM	Tube furnace set to 0
3/17/2011	3:38:51 PM	H2 valve closed
3/17/2011	3:38:51 PM	BCl3 valve closed
3/17/2011	3:38:51 PM	PH3 valve closed
3/17/2011	3:38:51 PM	SiCl4 pre valve closed
3/17/2011	3:38:51 PM	SiCl4 post valve closed
3/17/2011	3:38:51 PM	Bubbler valve closed
3/17/2011	3:38:51 PM	Helium valve opened
3/17/2011	3:38:51 PM	Main Vac valve opened
3/17/2011	3:38:51 PM	Bypass valve opened
3/17/2011	3:38:51 PM	Helium MFC set to  100.000000
3/17/2011	3:38:51 PM	H2 MFC set to  0.000000
3/17/2011	3:38:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:38:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:38:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:38:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:38:51 PM	Tube furnace set to 0
3/17/2011	3:39:51 PM	Helium valve closed
3/17/2011	3:39:51 PM	H2 valve closed
3/17/2011	3:39:51 PM	BCl3 valve closed
3/17/2011	3:39:51 PM	PH3 valve closed
3/17/2011	3:39:51 PM	SiCl4 pre valve closed
3/17/2011	3:39:51 PM	SiCl4 post valve closed
3/17/2011	3:39:51 PM	Bubbler valve closed
3/17/2011	3:39:51 PM	Main Vac valve opened
3/17/2011	3:39:51 PM	Bypass valve opened
3/17/2011	3:39:51 PM	Helium MFC set to  0.000000
3/17/2011	3:39:51 PM	H2 MFC set to  0.000000
3/17/2011	3:39:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:39:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:39:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:39:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:39:51 PM	Tube furnace set to 0
3/17/2011	3:40:51 PM	H2 valve closed
3/17/2011	3:40:51 PM	BCl3 valve closed
3/17/2011	3:40:51 PM	PH3 valve closed
3/17/2011	3:40:51 PM	SiCl4 pre valve closed
3/17/2011	3:40:51 PM	SiCl4 post valve closed
3/17/2011	3:40:51 PM	Bubbler valve closed
3/17/2011	3:40:51 PM	Helium valve opened
3/17/2011	3:40:51 PM	Main Vac valve opened
3/17/2011	3:40:51 PM	Bypass valve opened
3/17/2011	3:40:51 PM	Helium MFC set to  100.000000
3/17/2011	3:40:51 PM	H2 MFC set to  0.000000
3/17/2011	3:40:51 PM	BCl3 MFC set to  0.000000
3/17/2011	3:40:51 PM	PHl3 MFC set to  0.000000
3/17/2011	3:40:51 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:40:51 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:40:52 PM	Tube furnace set to 0
3/17/2011	3:41:52 PM	Helium valve closed
3/17/2011	3:41:52 PM	H2 valve closed
3/17/2011	3:41:52 PM	BCl3 valve closed
3/17/2011	3:41:52 PM	PH3 valve closed
3/17/2011	3:41:52 PM	SiCl4 pre valve closed
3/17/2011	3:41:52 PM	SiCl4 post valve closed
3/17/2011	3:41:52 PM	Bubbler valve closed
3/17/2011	3:41:52 PM	Main Vac valve opened
3/17/2011	3:41:52 PM	Bypass valve opened
3/17/2011	3:41:52 PM	Helium MFC set to  0.000000
3/17/2011	3:41:52 PM	H2 MFC set to  0.000000
3/17/2011	3:41:52 PM	BCl3 MFC set to  0.000000
3/17/2011	3:41:52 PM	PHl3 MFC set to  0.000000
3/17/2011	3:41:52 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:41:52 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:41:52 PM	Tube furnace set to 0
3/17/2011	3:42:52 PM	H2 valve closed
3/17/2011	3:42:52 PM	BCl3 valve closed
3/17/2011	3:42:52 PM	PH3 valve closed
3/17/2011	3:42:52 PM	SiCl4 pre valve closed
3/17/2011	3:42:52 PM	SiCl4 post valve closed
3/17/2011	3:42:52 PM	Bubbler valve closed
3/17/2011	3:42:52 PM	Helium valve opened
3/17/2011	3:42:52 PM	Main Vac valve opened
3/17/2011	3:42:52 PM	Bypass valve opened
3/17/2011	3:42:52 PM	Helium MFC set to  100.000000
3/17/2011	3:42:52 PM	H2 MFC set to  0.000000
3/17/2011	3:42:52 PM	BCl3 MFC set to  0.000000
3/17/2011	3:42:52 PM	PHl3 MFC set to  0.000000
3/17/2011	3:42:52 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:42:52 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:42:52 PM	Tube furnace set to 0
3/17/2011	3:43:52 PM	Helium valve closed
3/17/2011	3:43:52 PM	H2 valve closed
3/17/2011	3:43:52 PM	BCl3 valve closed
3/17/2011	3:43:52 PM	PH3 valve closed
3/17/2011	3:43:52 PM	SiCl4 pre valve closed
3/17/2011	3:43:52 PM	SiCl4 post valve closed
3/17/2011	3:43:52 PM	Bubbler valve closed
3/17/2011	3:43:52 PM	Main Vac valve opened
3/17/2011	3:43:52 PM	Bypass valve opened
3/17/2011	3:43:52 PM	Helium MFC set to  0.000000
3/17/2011	3:43:52 PM	H2 MFC set to  0.000000
3/17/2011	3:43:52 PM	BCl3 MFC set to  0.000000
3/17/2011	3:43:52 PM	PHl3 MFC set to  0.000000
3/17/2011	3:43:52 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:43:52 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:43:52 PM	Tube furnace set to 0
3/17/2011	3:44:52 PM	H2 valve closed
3/17/2011	3:44:52 PM	BCl3 valve closed
3/17/2011	3:44:52 PM	PH3 valve closed
3/17/2011	3:44:52 PM	SiCl4 pre valve closed
3/17/2011	3:44:52 PM	SiCl4 post valve closed
3/17/2011	3:44:52 PM	Bubbler valve closed
3/17/2011	3:44:52 PM	Helium valve opened
3/17/2011	3:44:52 PM	Main Vac valve opened
3/17/2011	3:44:52 PM	Bypass valve opened
3/17/2011	3:44:52 PM	Helium MFC set to  100.000000
3/17/2011	3:44:52 PM	H2 MFC set to  0.000000
3/17/2011	3:44:52 PM	BCl3 MFC set to  0.000000
3/17/2011	3:44:52 PM	PHl3 MFC set to  0.000000
3/17/2011	3:44:52 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:44:52 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:44:52 PM	Tube furnace set to 0
3/17/2011	3:45:52 PM	Helium valve closed
3/17/2011	3:45:52 PM	H2 valve closed
3/17/2011	3:45:52 PM	BCl3 valve closed
3/17/2011	3:45:52 PM	PH3 valve closed
3/17/2011	3:45:52 PM	SiCl4 pre valve closed
3/17/2011	3:45:52 PM	SiCl4 post valve closed
3/17/2011	3:45:52 PM	Bubbler valve closed
3/17/2011	3:45:52 PM	Main Vac valve opened
3/17/2011	3:45:52 PM	Bypass valve opened
3/17/2011	3:45:52 PM	Helium MFC set to  0.000000
3/17/2011	3:45:52 PM	H2 MFC set to  0.000000
3/17/2011	3:45:52 PM	BCl3 MFC set to  0.000000
3/17/2011	3:45:52 PM	PHl3 MFC set to  0.000000
3/17/2011	3:45:52 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:45:52 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:45:53 PM	Tube furnace set to 0
3/17/2011	3:46:53 PM	H2 valve closed
3/17/2011	3:46:53 PM	BCl3 valve closed
3/17/2011	3:46:53 PM	PH3 valve closed
3/17/2011	3:46:53 PM	SiCl4 pre valve closed
3/17/2011	3:46:53 PM	SiCl4 post valve closed
3/17/2011	3:46:53 PM	Bubbler valve closed
3/17/2011	3:46:53 PM	Helium valve opened
3/17/2011	3:46:53 PM	Main Vac valve opened
3/17/2011	3:46:53 PM	Bypass valve opened
3/17/2011	3:46:53 PM	Helium MFC set to  100.000000
3/17/2011	3:46:53 PM	H2 MFC set to  0.000000
3/17/2011	3:46:53 PM	BCl3 MFC set to  0.000000
3/17/2011	3:46:53 PM	PHl3 MFC set to  0.000000
3/17/2011	3:46:53 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:46:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:46:53 PM	Tube furnace set to 0
3/17/2011	3:47:53 PM	Helium valve closed
3/17/2011	3:47:53 PM	H2 valve closed
3/17/2011	3:47:53 PM	BCl3 valve closed
3/17/2011	3:47:53 PM	PH3 valve closed
3/17/2011	3:47:53 PM	SiCl4 pre valve closed
3/17/2011	3:47:53 PM	SiCl4 post valve closed
3/17/2011	3:47:53 PM	Bubbler valve closed
3/17/2011	3:47:53 PM	Main Vac valve opened
3/17/2011	3:47:53 PM	Bypass valve opened
3/17/2011	3:47:53 PM	Helium MFC set to  0.000000
3/17/2011	3:47:53 PM	H2 MFC set to  0.000000
3/17/2011	3:47:53 PM	BCl3 MFC set to  0.000000
3/17/2011	3:47:53 PM	PHl3 MFC set to  0.000000
3/17/2011	3:47:53 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:47:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:47:53 PM	Tube furnace set to 0
3/17/2011	3:48:53 PM	H2 valve closed
3/17/2011	3:48:53 PM	BCl3 valve closed
3/17/2011	3:48:53 PM	PH3 valve closed
3/17/2011	3:48:53 PM	SiCl4 pre valve closed
3/17/2011	3:48:53 PM	SiCl4 post valve closed
3/17/2011	3:48:53 PM	Bubbler valve closed
3/17/2011	3:48:53 PM	Helium valve opened
3/17/2011	3:48:53 PM	Main Vac valve opened
3/17/2011	3:48:53 PM	Bypass valve opened
3/17/2011	3:48:53 PM	Helium MFC set to  100.000000
3/17/2011	3:48:53 PM	H2 MFC set to  0.000000
3/17/2011	3:48:53 PM	BCl3 MFC set to  0.000000
3/17/2011	3:48:53 PM	PHl3 MFC set to  0.000000
3/17/2011	3:48:53 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:48:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:48:53 PM	Tube furnace set to 0
3/17/2011	3:49:53 PM	Helium valve closed
3/17/2011	3:49:53 PM	H2 valve closed
3/17/2011	3:49:53 PM	BCl3 valve closed
3/17/2011	3:49:53 PM	PH3 valve closed
3/17/2011	3:49:53 PM	SiCl4 pre valve closed
3/17/2011	3:49:53 PM	SiCl4 post valve closed
3/17/2011	3:49:53 PM	Bubbler valve closed
3/17/2011	3:49:53 PM	Main Vac valve opened
3/17/2011	3:49:53 PM	Bypass valve opened
3/17/2011	3:49:53 PM	Helium MFC set to  0.000000
3/17/2011	3:49:53 PM	H2 MFC set to  0.000000
3/17/2011	3:49:53 PM	BCl3 MFC set to  0.000000
3/17/2011	3:49:53 PM	PHl3 MFC set to  0.000000
3/17/2011	3:49:53 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:49:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:49:53 PM	Tube furnace set to 0
3/17/2011	3:50:53 PM	H2 valve closed
3/17/2011	3:50:53 PM	BCl3 valve closed
3/17/2011	3:50:53 PM	PH3 valve closed
3/17/2011	3:50:53 PM	SiCl4 pre valve closed
3/17/2011	3:50:53 PM	SiCl4 post valve closed
3/17/2011	3:50:53 PM	Bubbler valve closed
3/17/2011	3:50:53 PM	Helium valve opened
3/17/2011	3:50:53 PM	Main Vac valve opened
3/17/2011	3:50:53 PM	Bypass valve opened
3/17/2011	3:50:53 PM	Helium MFC set to  100.000000
3/17/2011	3:50:53 PM	H2 MFC set to  0.000000
3/17/2011	3:50:53 PM	BCl3 MFC set to  0.000000
3/17/2011	3:50:53 PM	PHl3 MFC set to  0.000000
3/17/2011	3:50:53 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:50:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:50:54 PM	Tube furnace set to 0
3/17/2011	3:51:54 PM	Helium valve closed
3/17/2011	3:51:54 PM	H2 valve closed
3/17/2011	3:51:54 PM	BCl3 valve closed
3/17/2011	3:51:54 PM	PH3 valve closed
3/17/2011	3:51:54 PM	SiCl4 pre valve closed
3/17/2011	3:51:54 PM	SiCl4 post valve closed
3/17/2011	3:51:54 PM	Bubbler valve closed
3/17/2011	3:51:54 PM	Main Vac valve opened
3/17/2011	3:51:54 PM	Bypass valve opened
3/17/2011	3:51:54 PM	Helium MFC set to  0.000000
3/17/2011	3:51:54 PM	H2 MFC set to  0.000000
3/17/2011	3:51:54 PM	BCl3 MFC set to  0.000000
3/17/2011	3:51:54 PM	PHl3 MFC set to  0.000000
3/17/2011	3:51:54 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:51:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:51:54 PM	Tube furnace set to 0
3/17/2011	3:52:54 PM	H2 valve closed
3/17/2011	3:52:54 PM	BCl3 valve closed
3/17/2011	3:52:54 PM	PH3 valve closed
3/17/2011	3:52:54 PM	SiCl4 pre valve closed
3/17/2011	3:52:54 PM	SiCl4 post valve closed
3/17/2011	3:52:54 PM	Bubbler valve closed
3/17/2011	3:52:54 PM	Helium valve opened
3/17/2011	3:52:54 PM	Main Vac valve opened
3/17/2011	3:52:54 PM	Bypass valve opened
3/17/2011	3:52:54 PM	Helium MFC set to  100.000000
3/17/2011	3:52:54 PM	H2 MFC set to  0.000000
3/17/2011	3:52:54 PM	BCl3 MFC set to  0.000000
3/17/2011	3:52:54 PM	PHl3 MFC set to  0.000000
3/17/2011	3:52:54 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:52:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:52:54 PM	Tube furnace set to 0
3/17/2011	3:53:54 PM	Helium valve closed
3/17/2011	3:53:54 PM	H2 valve closed
3/17/2011	3:53:54 PM	BCl3 valve closed
3/17/2011	3:53:54 PM	PH3 valve closed
3/17/2011	3:53:54 PM	SiCl4 pre valve closed
3/17/2011	3:53:54 PM	SiCl4 post valve closed
3/17/2011	3:53:54 PM	Bubbler valve closed
3/17/2011	3:53:54 PM	Main Vac valve opened
3/17/2011	3:53:54 PM	Bypass valve opened
3/17/2011	3:53:54 PM	Helium MFC set to  0.000000
3/17/2011	3:53:54 PM	H2 MFC set to  0.000000
3/17/2011	3:53:54 PM	BCl3 MFC set to  0.000000
3/17/2011	3:53:54 PM	PHl3 MFC set to  0.000000
3/17/2011	3:53:54 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:53:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:53:54 PM	Tube furnace set to 0
3/17/2011	3:54:54 PM	H2 valve closed
3/17/2011	3:54:54 PM	BCl3 valve closed
3/17/2011	3:54:54 PM	PH3 valve closed
3/17/2011	3:54:54 PM	SiCl4 pre valve closed
3/17/2011	3:54:54 PM	SiCl4 post valve closed
3/17/2011	3:54:54 PM	Bubbler valve closed
3/17/2011	3:54:54 PM	Helium valve opened
3/17/2011	3:54:54 PM	Main Vac valve opened
3/17/2011	3:54:54 PM	Bypass valve opened
3/17/2011	3:54:54 PM	Helium MFC set to  100.000000
3/17/2011	3:54:54 PM	H2 MFC set to  0.000000
3/17/2011	3:54:54 PM	BCl3 MFC set to  0.000000
3/17/2011	3:54:54 PM	PHl3 MFC set to  0.000000
3/17/2011	3:54:54 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:54:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:54:54 PM	Tube furnace set to 0
3/17/2011	3:55:54 PM	Helium valve closed
3/17/2011	3:55:54 PM	H2 valve closed
3/17/2011	3:55:54 PM	BCl3 valve closed
3/17/2011	3:55:54 PM	PH3 valve closed
3/17/2011	3:55:54 PM	SiCl4 pre valve closed
3/17/2011	3:55:54 PM	SiCl4 post valve closed
3/17/2011	3:55:54 PM	Bubbler valve closed
3/17/2011	3:55:54 PM	Main Vac valve opened
3/17/2011	3:55:54 PM	Bypass valve opened
3/17/2011	3:55:54 PM	Helium MFC set to  0.000000
3/17/2011	3:55:54 PM	H2 MFC set to  0.000000
3/17/2011	3:55:54 PM	BCl3 MFC set to  0.000000
3/17/2011	3:55:54 PM	PHl3 MFC set to  0.000000
3/17/2011	3:55:54 PM	SiCl4 MFC set to  0.000000
3/17/2011	3:55:54 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	3:55:55 PM	Tube furnace set to 0
3/17/2011	3:55:56 PM	Run finished at 3:55 PM
3/17/2011	3:55:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/17/2011	4:12:17 PM	Recipe started at 4:12 PM
3/17/2011	4:12:17 PM	Helium valve closed
3/17/2011	4:12:17 PM	BCl3 valve closed
3/17/2011	4:12:17 PM	PH3 valve closed
3/17/2011	4:12:17 PM	SiCl4 pre valve closed
3/17/2011	4:12:17 PM	SiCl4 post valve closed
3/17/2011	4:12:17 PM	Main Vac valve closed
3/17/2011	4:12:17 PM	Bypass valve closed
3/17/2011	4:12:17 PM	Bubbler valve closed
3/17/2011	4:12:17 PM	H2 valve opened
3/17/2011	4:12:17 PM	Helium MFC set to  0.000000
3/17/2011	4:12:17 PM	H2 MFC set to  500.000000
3/17/2011	4:12:17 PM	BCl3 MFC set to  0.000000
3/17/2011	4:12:17 PM	PHl3 MFC set to  0.000000
3/17/2011	4:12:17 PM	SiCl4 MFC set to  0.000000
3/17/2011	4:12:17 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	4:12:17 PM	Tube furnace set to 0
3/17/2011	4:13:35 PM	Helium valve closed
3/17/2011	4:13:35 PM	BCl3 valve closed
3/17/2011	4:13:35 PM	PH3 valve closed
3/17/2011	4:13:35 PM	SiCl4 pre valve closed
3/17/2011	4:13:35 PM	SiCl4 post valve closed
3/17/2011	4:13:35 PM	Main Vac valve closed
3/17/2011	4:13:35 PM	Bypass valve closed
3/17/2011	4:13:35 PM	H2 valve opened
3/17/2011	4:13:35 PM	Bubbler valve opened
3/17/2011	4:13:35 PM	Helium MFC set to  0.000000
3/17/2011	4:13:35 PM	H2 MFC set to  500.000000
3/17/2011	4:13:35 PM	BCl3 MFC set to  0.000000
3/17/2011	4:13:35 PM	PHl3 MFC set to  0.000000
3/17/2011	4:13:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	4:13:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	4:13:35 PM	Tube furnace set to 1000
3/17/2011	4:33:35 PM	Helium valve closed
3/17/2011	4:33:35 PM	PH3 valve closed
3/17/2011	4:33:35 PM	Main Vac valve closed
3/17/2011	4:33:35 PM	Bypass valve closed
3/17/2011	4:33:35 PM	H2 valve opened
3/17/2011	4:33:35 PM	BCl3 valve opened
3/17/2011	4:33:35 PM	SiCl4 pre valve opened
3/17/2011	4:33:35 PM	SiCl4 post valve opened
3/17/2011	4:33:35 PM	Bubbler valve opened
3/17/2011	4:33:35 PM	Helium MFC set to  0.000000
3/17/2011	4:33:35 PM	H2 MFC set to  500.000000
3/17/2011	4:33:35 PM	BCl3 MFC set to  3.000000
3/17/2011	4:33:35 PM	PHl3 MFC set to  0.000000
3/17/2011	4:33:35 PM	SiCl4 MFC set to  50.000000
3/17/2011	4:33:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	4:33:35 PM	Tube furnace set to 1000
3/17/2011	4:53:35 PM	H2 valve closed
3/17/2011	4:53:35 PM	BCl3 valve closed
3/17/2011	4:53:35 PM	PH3 valve closed
3/17/2011	4:53:35 PM	SiCl4 pre valve closed
3/17/2011	4:53:35 PM	SiCl4 post valve closed
3/17/2011	4:53:35 PM	Main Vac valve closed
3/17/2011	4:53:35 PM	Bypass valve closed
3/17/2011	4:53:35 PM	Helium valve opened
3/17/2011	4:53:35 PM	Bubbler valve opened
3/17/2011	4:53:35 PM	Helium MFC set to  500.000000
3/17/2011	4:53:35 PM	H2 MFC set to  0.000000
3/17/2011	4:53:35 PM	BCl3 MFC set to  0.000000
3/17/2011	4:53:35 PM	PHl3 MFC set to  0.000000
3/17/2011	4:53:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	4:53:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	4:53:35 PM	Tube furnace set to 0
3/17/2011	5:13:35 PM	Helium valve closed
3/17/2011	5:13:35 PM	H2 valve closed
3/17/2011	5:13:35 PM	BCl3 valve closed
3/17/2011	5:13:35 PM	PH3 valve closed
3/17/2011	5:13:35 PM	SiCl4 pre valve closed
3/17/2011	5:13:35 PM	SiCl4 post valve closed
3/17/2011	5:13:35 PM	Main Vac valve closed
3/17/2011	5:13:35 PM	Bypass valve closed
3/17/2011	5:13:35 PM	Bubbler valve closed
3/17/2011	5:13:35 PM	Helium MFC set to  0.000000
3/17/2011	5:13:35 PM	H2 MFC set to  0.000000
3/17/2011	5:13:35 PM	BCl3 MFC set to  0.000000
3/17/2011	5:13:35 PM	PHl3 MFC set to  0.000000
3/17/2011	5:13:35 PM	SiCl4 MFC set to  0.000000
3/17/2011	5:13:35 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	5:13:35 PM	Tube furnace set to 0
3/17/2011	5:13:36 PM	Run finished at 5:13 PM
3/17/2011	6:09:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/17/2011	6:09:53 PM	Recipe started at 6:09 PM
3/17/2011	6:09:53 PM	Helium valve closed
3/17/2011	6:09:53 PM	H2 valve closed
3/17/2011	6:09:53 PM	BCl3 valve closed
3/17/2011	6:09:53 PM	PH3 valve closed
3/17/2011	6:09:53 PM	SiCl4 pre valve closed
3/17/2011	6:09:53 PM	SiCl4 post valve closed
3/17/2011	6:09:53 PM	Main Vac valve closed
3/17/2011	6:09:53 PM	Bubbler valve closed
3/17/2011	6:09:53 PM	Bypass valve opened
3/17/2011	6:09:53 PM	Helium MFC set to  0.000000
3/17/2011	6:09:53 PM	H2 MFC set to  0.000000
3/17/2011	6:09:53 PM	BCl3 MFC set to  0.000000
3/17/2011	6:09:53 PM	PHl3 MFC set to  0.000000
3/17/2011	6:09:53 PM	SiCl4 MFC set to  0.000000
3/17/2011	6:09:53 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	6:09:54 PM	Tube furnace set to 0
3/17/2011	6:10:25 PM	Helium valve closed
3/17/2011	6:10:25 PM	H2 valve closed
3/17/2011	6:10:25 PM	BCl3 valve closed
3/17/2011	6:10:25 PM	PH3 valve closed
3/17/2011	6:10:25 PM	SiCl4 pre valve closed
3/17/2011	6:10:25 PM	SiCl4 post valve closed
3/17/2011	6:10:25 PM	Bubbler valve closed
3/17/2011	6:10:25 PM	Main Vac valve opened
3/17/2011	6:10:25 PM	Bypass valve opened
3/17/2011	6:10:25 PM	Helium MFC set to  0.000000
3/17/2011	6:10:25 PM	H2 MFC set to  0.000000
3/17/2011	6:10:25 PM	BCl3 MFC set to  0.000000
3/17/2011	6:10:25 PM	PHl3 MFC set to  0.000000
3/17/2011	6:10:25 PM	SiCl4 MFC set to  0.000000
3/17/2011	6:10:25 PM	Bypass solenoid MFC set to  0.000000
3/17/2011	6:10:25 PM	Tube furnace set to 0
3/17/2011	6:10:26 PM	Run finished at 6:10 PM
3/17/2011	6:10:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
